8/23/2012	12:58:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/23/2012	12:58:51 PM	Recipe started at 12:58 PM
8/23/2012	12:58:51 PM	Helium valve closed
8/23/2012	12:58:51 PM	H2 valve closed
8/23/2012	12:58:51 PM	BCl3 valve closed
8/23/2012	12:58:51 PM	PH3 valve closed
8/23/2012	12:58:51 PM	SiCl4 pre valve closed
8/23/2012	12:58:51 PM	SiCl4 post valve closed
8/23/2012	12:58:51 PM	Main Vac valve closed
8/23/2012	12:58:51 PM	Bypass valve closed
8/23/2012	12:58:51 PM	Bubbler valve closed
8/23/2012	12:58:51 PM	Helium MFC set to  0.000000
8/23/2012	12:58:51 PM	H2 MFC set to  0.000000
8/23/2012	12:58:51 PM	BCl3 MFC set to  0.000000
8/23/2012	12:58:51 PM	PH3 MFC set to  0.000000
8/23/2012	12:58:51 PM	SiCl4 MFC set to  0.000000
8/23/2012	12:58:51 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	12:58:51 PM	Tube furnace set to 0
8/23/2012	12:58:54 PM	H2 valve closed
8/23/2012	12:58:54 PM	BCl3 valve closed
8/23/2012	12:58:54 PM	PH3 valve closed
8/23/2012	12:58:54 PM	SiCl4 pre valve closed
8/23/2012	12:58:54 PM	SiCl4 post valve closed
8/23/2012	12:58:54 PM	Main Vac valve closed
8/23/2012	12:58:54 PM	Bypass valve closed
8/23/2012	12:58:54 PM	Bubbler valve closed
8/23/2012	12:58:54 PM	Helium valve opened
8/23/2012	12:58:54 PM	Helium MFC set to  500.000000
8/23/2012	12:58:54 PM	H2 MFC set to  0.000000
8/23/2012	12:58:54 PM	BCl3 MFC set to  0.000000
8/23/2012	12:58:54 PM	PH3 MFC set to  0.000000
8/23/2012	12:58:54 PM	SiCl4 MFC set to  0.000000
8/23/2012	12:58:54 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	12:58:54 PM	Tube furnace set to 0
8/23/2012	1:00:07 PM	Helium valve closed
8/23/2012	1:00:07 PM	H2 valve closed
8/23/2012	1:00:07 PM	BCl3 valve closed
8/23/2012	1:00:07 PM	PH3 valve closed
8/23/2012	1:00:07 PM	SiCl4 pre valve closed
8/23/2012	1:00:07 PM	SiCl4 post valve closed
8/23/2012	1:00:07 PM	Main Vac valve closed
8/23/2012	1:00:07 PM	Bypass valve closed
8/23/2012	1:00:07 PM	Bubbler valve closed
8/23/2012	1:00:07 PM	Helium MFC set to  0.000000
8/23/2012	1:00:07 PM	H2 MFC set to  0.000000
8/23/2012	1:00:07 PM	BCl3 MFC set to  0.000000
8/23/2012	1:00:07 PM	PH3 MFC set to  0.000000
8/23/2012	1:00:07 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:00:07 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:00:07 PM	Tube furnace set to 0
8/23/2012	1:00:08 PM	Run finished at 1:00 PM
8/23/2012	1:00:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/23/2012	1:01:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2012	1:01:52 PM	Recipe started at 1:01 PM
8/23/2012	1:01:52 PM	Helium valve closed
8/23/2012	1:01:52 PM	H2 valve closed
8/23/2012	1:01:52 PM	BCl3 valve closed
8/23/2012	1:01:52 PM	PH3 valve closed
8/23/2012	1:01:52 PM	SiCl4 pre valve closed
8/23/2012	1:01:52 PM	SiCl4 post valve closed
8/23/2012	1:01:52 PM	Main Vac valve closed
8/23/2012	1:01:52 PM	Bubbler valve closed
8/23/2012	1:01:52 PM	Bypass valve opened
8/23/2012	1:01:52 PM	Helium MFC set to  0.000000
8/23/2012	1:01:52 PM	H2 MFC set to  0.000000
8/23/2012	1:01:52 PM	BCl3 MFC set to  0.000000
8/23/2012	1:01:52 PM	PH3 MFC set to  0.000000
8/23/2012	1:01:52 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:01:52 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:01:52 PM	Tube furnace set to 0
8/23/2012	1:03:05 PM	Helium valve closed
8/23/2012	1:03:05 PM	H2 valve closed
8/23/2012	1:03:05 PM	BCl3 valve closed
8/23/2012	1:03:05 PM	PH3 valve closed
8/23/2012	1:03:05 PM	SiCl4 pre valve closed
8/23/2012	1:03:05 PM	SiCl4 post valve closed
8/23/2012	1:03:05 PM	Main Vac valve closed
8/23/2012	1:03:05 PM	Bubbler valve closed
8/23/2012	1:03:05 PM	Bypass valve opened
8/23/2012	1:03:05 PM	Helium MFC set to  0.000000
8/23/2012	1:03:05 PM	H2 MFC set to  0.000000
8/23/2012	1:03:05 PM	BCl3 MFC set to  0.000000
8/23/2012	1:03:05 PM	PH3 MFC set to  0.000000
8/23/2012	1:03:05 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:03:05 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:03:06 PM	Tube furnace set to 0
8/23/2012	1:03:53 PM	Helium valve closed
8/23/2012	1:03:53 PM	H2 valve closed
8/23/2012	1:03:53 PM	BCl3 valve closed
8/23/2012	1:03:53 PM	PH3 valve closed
8/23/2012	1:03:53 PM	SiCl4 pre valve closed
8/23/2012	1:03:53 PM	SiCl4 post valve closed
8/23/2012	1:03:53 PM	Bypass valve closed
8/23/2012	1:03:53 PM	Bubbler valve closed
8/23/2012	1:03:53 PM	Main Vac valve opened
8/23/2012	1:03:53 PM	Helium MFC set to  0.000000
8/23/2012	1:03:53 PM	H2 MFC set to  0.000000
8/23/2012	1:03:53 PM	BCl3 MFC set to  0.000000
8/23/2012	1:03:53 PM	PH3 MFC set to  0.000000
8/23/2012	1:03:53 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:03:53 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:03:53 PM	Tube furnace set to 0
8/23/2012	1:03:54 PM	Run finished at 1:03 PM
8/23/2012	1:03:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2012	1:06:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/23/2012	1:06:07 PM	Recipe started at 1:06 PM
8/23/2012	1:06:07 PM	Helium valve closed
8/23/2012	1:06:07 PM	H2 valve closed
8/23/2012	1:06:07 PM	BCl3 valve closed
8/23/2012	1:06:07 PM	PH3 valve closed
8/23/2012	1:06:07 PM	SiCl4 pre valve closed
8/23/2012	1:06:07 PM	SiCl4 post valve closed
8/23/2012	1:06:07 PM	Main Vac valve closed
8/23/2012	1:06:07 PM	Bypass valve closed
8/23/2012	1:06:07 PM	Bubbler valve closed
8/23/2012	1:06:08 PM	Helium MFC set to  0.000000
8/23/2012	1:06:08 PM	H2 MFC set to  0.000000
8/23/2012	1:06:08 PM	BCl3 MFC set to  0.000000
8/23/2012	1:06:08 PM	PH3 MFC set to  0.000000
8/23/2012	1:06:08 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:06:08 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:06:08 PM	Tube furnace set to 0
8/23/2012	1:06:11 PM	H2 valve closed
8/23/2012	1:06:11 PM	BCl3 valve closed
8/23/2012	1:06:11 PM	PH3 valve closed
8/23/2012	1:06:11 PM	SiCl4 pre valve closed
8/23/2012	1:06:11 PM	SiCl4 post valve closed
8/23/2012	1:06:11 PM	Main Vac valve closed
8/23/2012	1:06:11 PM	Bypass valve closed
8/23/2012	1:06:11 PM	Bubbler valve closed
8/23/2012	1:06:11 PM	Helium valve opened
8/23/2012	1:06:11 PM	Helium MFC set to  500.000000
8/23/2012	1:06:11 PM	H2 MFC set to  0.000000
8/23/2012	1:06:11 PM	BCl3 MFC set to  0.000000
8/23/2012	1:06:11 PM	PH3 MFC set to  0.000000
8/23/2012	1:06:11 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:06:11 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:06:11 PM	Tube furnace set to 0
8/23/2012	1:07:24 PM	Helium valve closed
8/23/2012	1:07:24 PM	H2 valve closed
8/23/2012	1:07:24 PM	BCl3 valve closed
8/23/2012	1:07:24 PM	PH3 valve closed
8/23/2012	1:07:24 PM	SiCl4 pre valve closed
8/23/2012	1:07:24 PM	SiCl4 post valve closed
8/23/2012	1:07:24 PM	Main Vac valve closed
8/23/2012	1:07:24 PM	Bypass valve closed
8/23/2012	1:07:24 PM	Bubbler valve closed
8/23/2012	1:07:24 PM	Helium MFC set to  0.000000
8/23/2012	1:07:24 PM	H2 MFC set to  0.000000
8/23/2012	1:07:24 PM	BCl3 MFC set to  0.000000
8/23/2012	1:07:24 PM	PH3 MFC set to  0.000000
8/23/2012	1:07:24 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:07:24 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:07:24 PM	Tube furnace set to 0
8/23/2012	1:07:25 PM	Run finished at 1:07 PM
8/23/2012	1:07:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/23/2012	1:09:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2012	1:09:30 PM	Recipe started at 1:09 PM
8/23/2012	1:09:30 PM	Helium valve closed
8/23/2012	1:09:30 PM	H2 valve closed
8/23/2012	1:09:30 PM	BCl3 valve closed
8/23/2012	1:09:30 PM	PH3 valve closed
8/23/2012	1:09:30 PM	SiCl4 pre valve closed
8/23/2012	1:09:30 PM	SiCl4 post valve closed
8/23/2012	1:09:30 PM	Main Vac valve closed
8/23/2012	1:09:30 PM	Bubbler valve closed
8/23/2012	1:09:30 PM	Bypass valve opened
8/23/2012	1:09:30 PM	Helium MFC set to  0.000000
8/23/2012	1:09:30 PM	H2 MFC set to  0.000000
8/23/2012	1:09:30 PM	BCl3 MFC set to  0.000000
8/23/2012	1:09:30 PM	PH3 MFC set to  0.000000
8/23/2012	1:09:30 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:09:30 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:09:30 PM	Tube furnace set to 0
8/23/2012	1:10:46 PM	Helium valve closed
8/23/2012	1:10:46 PM	H2 valve closed
8/23/2012	1:10:46 PM	BCl3 valve closed
8/23/2012	1:10:46 PM	PH3 valve closed
8/23/2012	1:10:46 PM	SiCl4 pre valve closed
8/23/2012	1:10:46 PM	SiCl4 post valve closed
8/23/2012	1:10:47 PM	Main Vac valve closed
8/23/2012	1:10:47 PM	Bubbler valve closed
8/23/2012	1:10:47 PM	Bypass valve opened
8/23/2012	1:10:47 PM	Helium MFC set to  0.000000
8/23/2012	1:10:47 PM	H2 MFC set to  0.000000
8/23/2012	1:10:47 PM	BCl3 MFC set to  0.000000
8/23/2012	1:10:47 PM	PH3 MFC set to  0.000000
8/23/2012	1:10:47 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:10:47 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:10:47 PM	Tube furnace set to 0
8/23/2012	1:11:47 PM	Helium valve closed
8/23/2012	1:11:47 PM	H2 valve closed
8/23/2012	1:11:47 PM	BCl3 valve closed
8/23/2012	1:11:47 PM	PH3 valve closed
8/23/2012	1:11:47 PM	SiCl4 pre valve closed
8/23/2012	1:11:47 PM	SiCl4 post valve closed
8/23/2012	1:11:47 PM	Bypass valve closed
8/23/2012	1:11:47 PM	Bubbler valve closed
8/23/2012	1:11:47 PM	Main Vac valve opened
8/23/2012	1:11:47 PM	Helium MFC set to  0.000000
8/23/2012	1:11:47 PM	H2 MFC set to  0.000000
8/23/2012	1:11:47 PM	BCl3 MFC set to  0.000000
8/23/2012	1:11:47 PM	PH3 MFC set to  0.000000
8/23/2012	1:11:47 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:11:47 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:11:47 PM	Tube furnace set to 0
8/23/2012	1:11:48 PM	Run finished at 1:11 PM
8/23/2012	1:11:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2012	1:29:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2012	1:29:36 PM	Recipe started at 1:29 PM
8/23/2012	1:29:36 PM	Helium valve closed
8/23/2012	1:29:36 PM	H2 valve closed
8/23/2012	1:29:36 PM	BCl3 valve closed
8/23/2012	1:29:36 PM	PH3 valve closed
8/23/2012	1:29:36 PM	SiCl4 pre valve closed
8/23/2012	1:29:36 PM	SiCl4 post valve closed
8/23/2012	1:29:36 PM	Main Vac valve closed
8/23/2012	1:29:36 PM	Bubbler valve closed
8/23/2012	1:29:36 PM	Bypass valve opened
8/23/2012	1:29:36 PM	Helium MFC set to  0.000000
8/23/2012	1:29:36 PM	H2 MFC set to  0.000000
8/23/2012	1:29:36 PM	BCl3 MFC set to  0.000000
8/23/2012	1:29:36 PM	PH3 MFC set to  0.000000
8/23/2012	1:29:36 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:29:36 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:29:36 PM	Tube furnace set to 0
8/23/2012	1:29:36 PM	Helium valve closed
8/23/2012	1:29:36 PM	H2 valve closed
8/23/2012	1:29:36 PM	BCl3 valve closed
8/23/2012	1:29:36 PM	PH3 valve closed
8/23/2012	1:29:36 PM	SiCl4 pre valve closed
8/23/2012	1:29:36 PM	SiCl4 post valve closed
8/23/2012	1:29:36 PM	Main Vac valve closed
8/23/2012	1:29:36 PM	Bubbler valve closed
8/23/2012	1:29:36 PM	Bypass valve opened
8/23/2012	1:29:36 PM	Helium MFC set to  0.000000
8/23/2012	1:29:36 PM	H2 MFC set to  0.000000
8/23/2012	1:29:36 PM	BCl3 MFC set to  0.000000
8/23/2012	1:29:36 PM	PH3 MFC set to  0.000000
8/23/2012	1:29:36 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:29:36 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:29:36 PM	Tube furnace set to 0
8/23/2012	1:29:37 PM	Helium valve closed
8/23/2012	1:29:37 PM	H2 valve closed
8/23/2012	1:29:37 PM	BCl3 valve closed
8/23/2012	1:29:37 PM	PH3 valve closed
8/23/2012	1:29:37 PM	SiCl4 pre valve closed
8/23/2012	1:29:37 PM	SiCl4 post valve closed
8/23/2012	1:29:37 PM	Bypass valve closed
8/23/2012	1:29:37 PM	Bubbler valve closed
8/23/2012	1:29:37 PM	Main Vac valve opened
8/23/2012	1:29:37 PM	Helium MFC set to  0.000000
8/23/2012	1:29:37 PM	H2 MFC set to  0.000000
8/23/2012	1:29:37 PM	BCl3 MFC set to  0.000000
8/23/2012	1:29:37 PM	PH3 MFC set to  0.000000
8/23/2012	1:29:37 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:29:37 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:29:37 PM	Tube furnace set to 0
8/23/2012	1:29:37 PM	H2 valve closed
8/23/2012	1:29:37 PM	BCl3 valve closed
8/23/2012	1:29:37 PM	PH3 valve closed
8/23/2012	1:29:37 PM	SiCl4 pre valve closed
8/23/2012	1:29:37 PM	SiCl4 post valve closed
8/23/2012	1:29:37 PM	Bypass valve closed
8/23/2012	1:29:37 PM	Bubbler valve closed
8/23/2012	1:29:37 PM	Helium valve opened
8/23/2012	1:29:37 PM	Main Vac valve opened
8/23/2012	1:29:37 PM	Helium MFC set to  20.000000
8/23/2012	1:29:37 PM	H2 MFC set to  0.000000
8/23/2012	1:29:37 PM	BCl3 MFC set to  0.000000
8/23/2012	1:29:37 PM	PH3 MFC set to  0.000000
8/23/2012	1:29:37 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:29:37 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:29:37 PM	Tube furnace set to 0
8/23/2012	1:30:07 PM	Helium valve closed
8/23/2012	1:30:07 PM	H2 valve closed
8/23/2012	1:30:07 PM	BCl3 valve closed
8/23/2012	1:30:07 PM	PH3 valve closed
8/23/2012	1:30:07 PM	SiCl4 pre valve closed
8/23/2012	1:30:07 PM	SiCl4 post valve closed
8/23/2012	1:30:07 PM	Bypass valve closed
8/23/2012	1:30:07 PM	Bubbler valve closed
8/23/2012	1:30:07 PM	Main Vac valve opened
8/23/2012	1:30:07 PM	Helium MFC set to  0.000000
8/23/2012	1:30:07 PM	H2 MFC set to  0.000000
8/23/2012	1:30:07 PM	BCl3 MFC set to  0.000000
8/23/2012	1:30:07 PM	PH3 MFC set to  0.000000
8/23/2012	1:30:07 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:30:07 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:30:08 PM	Tube furnace set to 0
8/23/2012	1:30:38 PM	H2 valve closed
8/23/2012	1:30:38 PM	BCl3 valve closed
8/23/2012	1:30:38 PM	PH3 valve closed
8/23/2012	1:30:38 PM	SiCl4 pre valve closed
8/23/2012	1:30:38 PM	SiCl4 post valve closed
8/23/2012	1:30:38 PM	Bypass valve closed
8/23/2012	1:30:38 PM	Bubbler valve closed
8/23/2012	1:30:38 PM	Helium valve opened
8/23/2012	1:30:38 PM	Main Vac valve opened
8/23/2012	1:30:38 PM	Helium MFC set to  20.000000
8/23/2012	1:30:38 PM	H2 MFC set to  0.000000
8/23/2012	1:30:38 PM	BCl3 MFC set to  0.000000
8/23/2012	1:30:38 PM	PH3 MFC set to  0.000000
8/23/2012	1:30:38 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:30:38 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:30:38 PM	Tube furnace set to 0
8/23/2012	1:31:08 PM	Helium valve closed
8/23/2012	1:31:08 PM	H2 valve closed
8/23/2012	1:31:08 PM	BCl3 valve closed
8/23/2012	1:31:08 PM	PH3 valve closed
8/23/2012	1:31:08 PM	SiCl4 pre valve closed
8/23/2012	1:31:08 PM	SiCl4 post valve closed
8/23/2012	1:31:08 PM	Bypass valve closed
8/23/2012	1:31:08 PM	Bubbler valve closed
8/23/2012	1:31:08 PM	Main Vac valve opened
8/23/2012	1:31:08 PM	Helium MFC set to  0.000000
8/23/2012	1:31:08 PM	H2 MFC set to  0.000000
8/23/2012	1:31:08 PM	BCl3 MFC set to  0.000000
8/23/2012	1:31:08 PM	PH3 MFC set to  0.000000
8/23/2012	1:31:08 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:31:08 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:31:08 PM	Tube furnace set to 0
8/23/2012	1:31:38 PM	H2 valve closed
8/23/2012	1:31:38 PM	BCl3 valve closed
8/23/2012	1:31:38 PM	PH3 valve closed
8/23/2012	1:31:38 PM	SiCl4 pre valve closed
8/23/2012	1:31:38 PM	SiCl4 post valve closed
8/23/2012	1:31:38 PM	Bypass valve closed
8/23/2012	1:31:38 PM	Bubbler valve closed
8/23/2012	1:31:38 PM	Helium valve opened
8/23/2012	1:31:38 PM	Main Vac valve opened
8/23/2012	1:31:38 PM	Helium MFC set to  20.000000
8/23/2012	1:31:38 PM	H2 MFC set to  0.000000
8/23/2012	1:31:38 PM	BCl3 MFC set to  0.000000
8/23/2012	1:31:38 PM	PH3 MFC set to  0.000000
8/23/2012	1:31:38 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:31:38 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:31:38 PM	Tube furnace set to 0
8/23/2012	1:32:08 PM	Helium valve closed
8/23/2012	1:32:08 PM	H2 valve closed
8/23/2012	1:32:08 PM	BCl3 valve closed
8/23/2012	1:32:08 PM	PH3 valve closed
8/23/2012	1:32:08 PM	SiCl4 pre valve closed
8/23/2012	1:32:08 PM	SiCl4 post valve closed
8/23/2012	1:32:08 PM	Bypass valve closed
8/23/2012	1:32:08 PM	Bubbler valve closed
8/23/2012	1:32:08 PM	Main Vac valve opened
8/23/2012	1:32:08 PM	Helium MFC set to  0.000000
8/23/2012	1:32:08 PM	H2 MFC set to  0.000000
8/23/2012	1:32:08 PM	BCl3 MFC set to  0.000000
8/23/2012	1:32:08 PM	PH3 MFC set to  0.000000
8/23/2012	1:32:08 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:32:08 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:32:08 PM	Tube furnace set to 0
8/23/2012	1:32:39 PM	H2 valve closed
8/23/2012	1:32:39 PM	BCl3 valve closed
8/23/2012	1:32:39 PM	PH3 valve closed
8/23/2012	1:32:39 PM	SiCl4 pre valve closed
8/23/2012	1:32:39 PM	SiCl4 post valve closed
8/23/2012	1:32:39 PM	Bypass valve closed
8/23/2012	1:32:39 PM	Bubbler valve closed
8/23/2012	1:32:39 PM	Helium valve opened
8/23/2012	1:32:39 PM	Main Vac valve opened
8/23/2012	1:32:39 PM	Helium MFC set to  20.000000
8/23/2012	1:32:39 PM	H2 MFC set to  0.000000
8/23/2012	1:32:39 PM	BCl3 MFC set to  0.000000
8/23/2012	1:32:39 PM	PH3 MFC set to  0.000000
8/23/2012	1:32:39 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:32:39 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:32:39 PM	Tube furnace set to 0
8/23/2012	1:33:09 PM	Helium valve closed
8/23/2012	1:33:09 PM	H2 valve closed
8/23/2012	1:33:09 PM	BCl3 valve closed
8/23/2012	1:33:09 PM	PH3 valve closed
8/23/2012	1:33:09 PM	SiCl4 pre valve closed
8/23/2012	1:33:09 PM	SiCl4 post valve closed
8/23/2012	1:33:09 PM	Bypass valve closed
8/23/2012	1:33:09 PM	Bubbler valve closed
8/23/2012	1:33:09 PM	Main Vac valve opened
8/23/2012	1:33:09 PM	Helium MFC set to  0.000000
8/23/2012	1:33:09 PM	H2 MFC set to  0.000000
8/23/2012	1:33:09 PM	BCl3 MFC set to  0.000000
8/23/2012	1:33:09 PM	PH3 MFC set to  0.000000
8/23/2012	1:33:09 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:33:09 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:33:09 PM	Tube furnace set to 0
8/23/2012	1:33:39 PM	H2 valve closed
8/23/2012	1:33:39 PM	BCl3 valve closed
8/23/2012	1:33:39 PM	PH3 valve closed
8/23/2012	1:33:39 PM	SiCl4 pre valve closed
8/23/2012	1:33:39 PM	SiCl4 post valve closed
8/23/2012	1:33:39 PM	Bypass valve closed
8/23/2012	1:33:39 PM	Bubbler valve closed
8/23/2012	1:33:39 PM	Helium valve opened
8/23/2012	1:33:39 PM	Main Vac valve opened
8/23/2012	1:33:39 PM	Helium MFC set to  20.000000
8/23/2012	1:33:39 PM	H2 MFC set to  0.000000
8/23/2012	1:33:39 PM	BCl3 MFC set to  0.000000
8/23/2012	1:33:39 PM	PH3 MFC set to  0.000000
8/23/2012	1:33:39 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:33:39 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:33:39 PM	Tube furnace set to 0
8/23/2012	1:34:09 PM	Helium valve closed
8/23/2012	1:34:09 PM	H2 valve closed
8/23/2012	1:34:09 PM	BCl3 valve closed
8/23/2012	1:34:09 PM	PH3 valve closed
8/23/2012	1:34:09 PM	SiCl4 pre valve closed
8/23/2012	1:34:09 PM	SiCl4 post valve closed
8/23/2012	1:34:09 PM	Bypass valve closed
8/23/2012	1:34:09 PM	Bubbler valve closed
8/23/2012	1:34:09 PM	Main Vac valve opened
8/23/2012	1:34:09 PM	Helium MFC set to  0.000000
8/23/2012	1:34:09 PM	H2 MFC set to  0.000000
8/23/2012	1:34:09 PM	BCl3 MFC set to  0.000000
8/23/2012	1:34:09 PM	PH3 MFC set to  0.000000
8/23/2012	1:34:09 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:34:09 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:34:09 PM	Tube furnace set to 0
8/23/2012	1:34:39 PM	H2 valve closed
8/23/2012	1:34:39 PM	BCl3 valve closed
8/23/2012	1:34:39 PM	PH3 valve closed
8/23/2012	1:34:39 PM	SiCl4 pre valve closed
8/23/2012	1:34:39 PM	SiCl4 post valve closed
8/23/2012	1:34:39 PM	Bypass valve closed
8/23/2012	1:34:39 PM	Bubbler valve closed
8/23/2012	1:34:39 PM	Helium valve opened
8/23/2012	1:34:39 PM	Main Vac valve opened
8/23/2012	1:34:39 PM	Helium MFC set to  20.000000
8/23/2012	1:34:40 PM	H2 MFC set to  0.000000
8/23/2012	1:34:40 PM	BCl3 MFC set to  0.000000
8/23/2012	1:34:40 PM	PH3 MFC set to  0.000000
8/23/2012	1:34:40 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:34:40 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:34:40 PM	Tube furnace set to 0
8/23/2012	1:35:10 PM	Helium valve closed
8/23/2012	1:35:10 PM	H2 valve closed
8/23/2012	1:35:10 PM	BCl3 valve closed
8/23/2012	1:35:10 PM	PH3 valve closed
8/23/2012	1:35:10 PM	SiCl4 pre valve closed
8/23/2012	1:35:10 PM	SiCl4 post valve closed
8/23/2012	1:35:10 PM	Bypass valve closed
8/23/2012	1:35:10 PM	Bubbler valve closed
8/23/2012	1:35:10 PM	Main Vac valve opened
8/23/2012	1:35:10 PM	Helium MFC set to  0.000000
8/23/2012	1:35:10 PM	H2 MFC set to  0.000000
8/23/2012	1:35:10 PM	BCl3 MFC set to  0.000000
8/23/2012	1:35:10 PM	PH3 MFC set to  0.000000
8/23/2012	1:35:10 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:35:10 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:35:10 PM	Tube furnace set to 0
8/23/2012	1:35:40 PM	H2 valve closed
8/23/2012	1:35:40 PM	BCl3 valve closed
8/23/2012	1:35:40 PM	PH3 valve closed
8/23/2012	1:35:40 PM	SiCl4 pre valve closed
8/23/2012	1:35:40 PM	SiCl4 post valve closed
8/23/2012	1:35:40 PM	Bypass valve closed
8/23/2012	1:35:40 PM	Bubbler valve closed
8/23/2012	1:35:40 PM	Helium valve opened
8/23/2012	1:35:40 PM	Main Vac valve opened
8/23/2012	1:35:40 PM	Helium MFC set to  20.000000
8/23/2012	1:35:40 PM	H2 MFC set to  0.000000
8/23/2012	1:35:40 PM	BCl3 MFC set to  0.000000
8/23/2012	1:35:40 PM	PH3 MFC set to  0.000000
8/23/2012	1:35:40 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:35:40 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:35:40 PM	Tube furnace set to 0
8/23/2012	1:36:10 PM	Helium valve closed
8/23/2012	1:36:10 PM	H2 valve closed
8/23/2012	1:36:10 PM	BCl3 valve closed
8/23/2012	1:36:10 PM	PH3 valve closed
8/23/2012	1:36:10 PM	SiCl4 pre valve closed
8/23/2012	1:36:10 PM	SiCl4 post valve closed
8/23/2012	1:36:10 PM	Bypass valve closed
8/23/2012	1:36:10 PM	Bubbler valve closed
8/23/2012	1:36:10 PM	Main Vac valve opened
8/23/2012	1:36:10 PM	Helium MFC set to  0.000000
8/23/2012	1:36:10 PM	H2 MFC set to  0.000000
8/23/2012	1:36:10 PM	BCl3 MFC set to  0.000000
8/23/2012	1:36:10 PM	PH3 MFC set to  0.000000
8/23/2012	1:36:10 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:36:10 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:36:10 PM	Tube furnace set to 0
8/23/2012	1:36:40 PM	H2 valve closed
8/23/2012	1:36:40 PM	BCl3 valve closed
8/23/2012	1:36:40 PM	PH3 valve closed
8/23/2012	1:36:40 PM	SiCl4 pre valve closed
8/23/2012	1:36:40 PM	SiCl4 post valve closed
8/23/2012	1:36:40 PM	Bypass valve closed
8/23/2012	1:36:40 PM	Bubbler valve closed
8/23/2012	1:36:40 PM	Helium valve opened
8/23/2012	1:36:40 PM	Main Vac valve opened
8/23/2012	1:36:40 PM	Helium MFC set to  20.000000
8/23/2012	1:36:40 PM	H2 MFC set to  0.000000
8/23/2012	1:36:40 PM	BCl3 MFC set to  0.000000
8/23/2012	1:36:40 PM	PH3 MFC set to  0.000000
8/23/2012	1:36:40 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:36:40 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:36:41 PM	Tube furnace set to 0
8/23/2012	1:37:11 PM	Helium valve closed
8/23/2012	1:37:11 PM	H2 valve closed
8/23/2012	1:37:11 PM	BCl3 valve closed
8/23/2012	1:37:11 PM	PH3 valve closed
8/23/2012	1:37:11 PM	SiCl4 pre valve closed
8/23/2012	1:37:11 PM	SiCl4 post valve closed
8/23/2012	1:37:11 PM	Bypass valve closed
8/23/2012	1:37:11 PM	Bubbler valve closed
8/23/2012	1:37:11 PM	Main Vac valve opened
8/23/2012	1:37:11 PM	Helium MFC set to  0.000000
8/23/2012	1:37:11 PM	H2 MFC set to  0.000000
8/23/2012	1:37:11 PM	BCl3 MFC set to  0.000000
8/23/2012	1:37:11 PM	PH3 MFC set to  0.000000
8/23/2012	1:37:11 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:37:11 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:37:11 PM	Tube furnace set to 0
8/23/2012	1:37:41 PM	H2 valve closed
8/23/2012	1:37:41 PM	BCl3 valve closed
8/23/2012	1:37:41 PM	PH3 valve closed
8/23/2012	1:37:41 PM	SiCl4 pre valve closed
8/23/2012	1:37:41 PM	SiCl4 post valve closed
8/23/2012	1:37:41 PM	Bypass valve closed
8/23/2012	1:37:41 PM	Bubbler valve closed
8/23/2012	1:37:41 PM	Helium valve opened
8/23/2012	1:37:41 PM	Main Vac valve opened
8/23/2012	1:37:41 PM	Helium MFC set to  20.000000
8/23/2012	1:37:41 PM	H2 MFC set to  0.000000
8/23/2012	1:37:41 PM	BCl3 MFC set to  0.000000
8/23/2012	1:37:41 PM	PH3 MFC set to  0.000000
8/23/2012	1:37:41 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:37:41 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:37:41 PM	Tube furnace set to 0
8/23/2012	1:38:11 PM	Helium valve closed
8/23/2012	1:38:11 PM	H2 valve closed
8/23/2012	1:38:11 PM	BCl3 valve closed
8/23/2012	1:38:11 PM	PH3 valve closed
8/23/2012	1:38:11 PM	SiCl4 pre valve closed
8/23/2012	1:38:11 PM	SiCl4 post valve closed
8/23/2012	1:38:11 PM	Bypass valve closed
8/23/2012	1:38:11 PM	Bubbler valve closed
8/23/2012	1:38:11 PM	Main Vac valve opened
8/23/2012	1:38:11 PM	Helium MFC set to  0.000000
8/23/2012	1:38:11 PM	H2 MFC set to  0.000000
8/23/2012	1:38:11 PM	BCl3 MFC set to  0.000000
8/23/2012	1:38:11 PM	PH3 MFC set to  0.000000
8/23/2012	1:38:11 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:38:11 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:38:11 PM	Tube furnace set to 0
8/23/2012	1:38:41 PM	H2 valve closed
8/23/2012	1:38:41 PM	BCl3 valve closed
8/23/2012	1:38:41 PM	PH3 valve closed
8/23/2012	1:38:41 PM	SiCl4 pre valve closed
8/23/2012	1:38:41 PM	SiCl4 post valve closed
8/23/2012	1:38:41 PM	Bypass valve closed
8/23/2012	1:38:41 PM	Bubbler valve closed
8/23/2012	1:38:41 PM	Helium valve opened
8/23/2012	1:38:41 PM	Main Vac valve opened
8/23/2012	1:38:41 PM	Helium MFC set to  20.000000
8/23/2012	1:38:41 PM	H2 MFC set to  0.000000
8/23/2012	1:38:41 PM	BCl3 MFC set to  0.000000
8/23/2012	1:38:41 PM	PH3 MFC set to  0.000000
8/23/2012	1:38:41 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:38:41 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:38:42 PM	Tube furnace set to 0
8/23/2012	1:39:12 PM	Helium valve closed
8/23/2012	1:39:12 PM	H2 valve closed
8/23/2012	1:39:12 PM	BCl3 valve closed
8/23/2012	1:39:12 PM	PH3 valve closed
8/23/2012	1:39:12 PM	SiCl4 pre valve closed
8/23/2012	1:39:12 PM	SiCl4 post valve closed
8/23/2012	1:39:12 PM	Bypass valve closed
8/23/2012	1:39:12 PM	Bubbler valve closed
8/23/2012	1:39:12 PM	Main Vac valve opened
8/23/2012	1:39:12 PM	Helium MFC set to  0.000000
8/23/2012	1:39:12 PM	H2 MFC set to  0.000000
8/23/2012	1:39:12 PM	BCl3 MFC set to  0.000000
8/23/2012	1:39:12 PM	PH3 MFC set to  0.000000
8/23/2012	1:39:12 PM	SiCl4 MFC set to  0.000000
8/23/2012	1:39:12 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	1:39:12 PM	Tube furnace set to 0
8/23/2012	1:39:13 PM	Run finished at 1:39 PM
8/23/2012	1:39:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2012	2:01:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2012	2:01:14 PM	Recipe started at 2:01 PM
8/23/2012	2:01:14 PM	Helium valve closed
8/23/2012	2:01:14 PM	H2 valve closed
8/23/2012	2:01:14 PM	BCl3 valve closed
8/23/2012	2:01:14 PM	PH3 valve closed
8/23/2012	2:01:14 PM	SiCl4 pre valve closed
8/23/2012	2:01:14 PM	SiCl4 post valve closed
8/23/2012	2:01:14 PM	Main Vac valve closed
8/23/2012	2:01:14 PM	Bubbler valve closed
8/23/2012	2:01:14 PM	Bypass valve opened
8/23/2012	2:01:14 PM	Helium MFC set to  0.000000
8/23/2012	2:01:14 PM	H2 MFC set to  0.000000
8/23/2012	2:01:14 PM	BCl3 MFC set to  0.000000
8/23/2012	2:01:14 PM	PH3 MFC set to  0.000000
8/23/2012	2:01:14 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:01:14 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:01:14 PM	Tube furnace set to 0
8/23/2012	2:01:14 PM	Helium valve closed
8/23/2012	2:01:14 PM	H2 valve closed
8/23/2012	2:01:14 PM	BCl3 valve closed
8/23/2012	2:01:14 PM	PH3 valve closed
8/23/2012	2:01:14 PM	SiCl4 pre valve closed
8/23/2012	2:01:14 PM	SiCl4 post valve closed
8/23/2012	2:01:14 PM	Main Vac valve closed
8/23/2012	2:01:14 PM	Bubbler valve closed
8/23/2012	2:01:14 PM	Bypass valve opened
8/23/2012	2:01:14 PM	Helium MFC set to  0.000000
8/23/2012	2:01:14 PM	H2 MFC set to  0.000000
8/23/2012	2:01:14 PM	BCl3 MFC set to  0.000000
8/23/2012	2:01:14 PM	PH3 MFC set to  0.000000
8/23/2012	2:01:14 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:01:14 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:01:15 PM	Tube furnace set to 0
8/23/2012	2:01:15 PM	Helium valve closed
8/23/2012	2:01:15 PM	H2 valve closed
8/23/2012	2:01:15 PM	BCl3 valve closed
8/23/2012	2:01:15 PM	PH3 valve closed
8/23/2012	2:01:15 PM	SiCl4 pre valve closed
8/23/2012	2:01:15 PM	SiCl4 post valve closed
8/23/2012	2:01:15 PM	Bypass valve closed
8/23/2012	2:01:15 PM	Bubbler valve closed
8/23/2012	2:01:15 PM	Main Vac valve opened
8/23/2012	2:01:15 PM	Helium MFC set to  0.000000
8/23/2012	2:01:15 PM	H2 MFC set to  0.000000
8/23/2012	2:01:15 PM	BCl3 MFC set to  0.000000
8/23/2012	2:01:15 PM	PH3 MFC set to  0.000000
8/23/2012	2:01:15 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:01:15 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:01:15 PM	Tube furnace set to 0
8/23/2012	2:01:16 PM	H2 valve closed
8/23/2012	2:01:16 PM	BCl3 valve closed
8/23/2012	2:01:16 PM	PH3 valve closed
8/23/2012	2:01:16 PM	SiCl4 pre valve closed
8/23/2012	2:01:16 PM	SiCl4 post valve closed
8/23/2012	2:01:16 PM	Bypass valve closed
8/23/2012	2:01:16 PM	Bubbler valve closed
8/23/2012	2:01:16 PM	Helium valve opened
8/23/2012	2:01:16 PM	Main Vac valve opened
8/23/2012	2:01:16 PM	Helium MFC set to  20.000000
8/23/2012	2:01:16 PM	H2 MFC set to  0.000000
8/23/2012	2:01:16 PM	BCl3 MFC set to  0.000000
8/23/2012	2:01:16 PM	PH3 MFC set to  0.000000
8/23/2012	2:01:16 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:01:16 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:01:16 PM	Tube furnace set to 0
8/23/2012	2:01:46 PM	Helium valve closed
8/23/2012	2:01:46 PM	H2 valve closed
8/23/2012	2:01:46 PM	BCl3 valve closed
8/23/2012	2:01:46 PM	PH3 valve closed
8/23/2012	2:01:46 PM	SiCl4 pre valve closed
8/23/2012	2:01:46 PM	SiCl4 post valve closed
8/23/2012	2:01:46 PM	Bypass valve closed
8/23/2012	2:01:46 PM	Bubbler valve closed
8/23/2012	2:01:46 PM	Main Vac valve opened
8/23/2012	2:01:46 PM	Helium MFC set to  0.000000
8/23/2012	2:01:46 PM	H2 MFC set to  0.000000
8/23/2012	2:01:46 PM	BCl3 MFC set to  0.000000
8/23/2012	2:01:46 PM	PH3 MFC set to  0.000000
8/23/2012	2:01:46 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:01:46 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:01:46 PM	Tube furnace set to 0
8/23/2012	2:02:16 PM	H2 valve closed
8/23/2012	2:02:16 PM	BCl3 valve closed
8/23/2012	2:02:16 PM	PH3 valve closed
8/23/2012	2:02:16 PM	SiCl4 pre valve closed
8/23/2012	2:02:16 PM	SiCl4 post valve closed
8/23/2012	2:02:16 PM	Bypass valve closed
8/23/2012	2:02:16 PM	Bubbler valve closed
8/23/2012	2:02:16 PM	Helium valve opened
8/23/2012	2:02:16 PM	Main Vac valve opened
8/23/2012	2:02:16 PM	Helium MFC set to  20.000000
8/23/2012	2:02:16 PM	H2 MFC set to  0.000000
8/23/2012	2:02:16 PM	BCl3 MFC set to  0.000000
8/23/2012	2:02:16 PM	PH3 MFC set to  0.000000
8/23/2012	2:02:16 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:02:16 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:02:16 PM	Tube furnace set to 0
8/23/2012	2:02:46 PM	Helium valve closed
8/23/2012	2:02:46 PM	H2 valve closed
8/23/2012	2:02:46 PM	BCl3 valve closed
8/23/2012	2:02:47 PM	PH3 valve closed
8/23/2012	2:02:47 PM	SiCl4 pre valve closed
8/23/2012	2:02:47 PM	SiCl4 post valve closed
8/23/2012	2:02:47 PM	Bypass valve closed
8/23/2012	2:02:47 PM	Bubbler valve closed
8/23/2012	2:02:47 PM	Main Vac valve opened
8/23/2012	2:02:47 PM	Helium MFC set to  0.000000
8/23/2012	2:02:47 PM	H2 MFC set to  0.000000
8/23/2012	2:02:47 PM	BCl3 MFC set to  0.000000
8/23/2012	2:02:47 PM	PH3 MFC set to  0.000000
8/23/2012	2:02:47 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:02:47 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:02:47 PM	Tube furnace set to 0
8/23/2012	2:03:17 PM	H2 valve closed
8/23/2012	2:03:17 PM	BCl3 valve closed
8/23/2012	2:03:17 PM	PH3 valve closed
8/23/2012	2:03:17 PM	SiCl4 pre valve closed
8/23/2012	2:03:17 PM	SiCl4 post valve closed
8/23/2012	2:03:17 PM	Bypass valve closed
8/23/2012	2:03:17 PM	Bubbler valve closed
8/23/2012	2:03:17 PM	Helium valve opened
8/23/2012	2:03:17 PM	Main Vac valve opened
8/23/2012	2:03:17 PM	Helium MFC set to  20.000000
8/23/2012	2:03:17 PM	H2 MFC set to  0.000000
8/23/2012	2:03:17 PM	BCl3 MFC set to  0.000000
8/23/2012	2:03:17 PM	PH3 MFC set to  0.000000
8/23/2012	2:03:17 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:03:17 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:03:17 PM	Tube furnace set to 0
8/23/2012	2:03:47 PM	Helium valve closed
8/23/2012	2:03:47 PM	H2 valve closed
8/23/2012	2:03:47 PM	BCl3 valve closed
8/23/2012	2:03:47 PM	PH3 valve closed
8/23/2012	2:03:47 PM	SiCl4 pre valve closed
8/23/2012	2:03:47 PM	SiCl4 post valve closed
8/23/2012	2:03:47 PM	Bypass valve closed
8/23/2012	2:03:47 PM	Bubbler valve closed
8/23/2012	2:03:47 PM	Main Vac valve opened
8/23/2012	2:03:47 PM	Helium MFC set to  0.000000
8/23/2012	2:03:47 PM	H2 MFC set to  0.000000
8/23/2012	2:03:47 PM	BCl3 MFC set to  0.000000
8/23/2012	2:03:47 PM	PH3 MFC set to  0.000000
8/23/2012	2:03:47 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:03:47 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:03:47 PM	Tube furnace set to 0
8/23/2012	2:04:17 PM	H2 valve closed
8/23/2012	2:04:17 PM	BCl3 valve closed
8/23/2012	2:04:17 PM	PH3 valve closed
8/23/2012	2:04:17 PM	SiCl4 pre valve closed
8/23/2012	2:04:17 PM	SiCl4 post valve closed
8/23/2012	2:04:17 PM	Bypass valve closed
8/23/2012	2:04:17 PM	Bubbler valve closed
8/23/2012	2:04:17 PM	Helium valve opened
8/23/2012	2:04:17 PM	Main Vac valve opened
8/23/2012	2:04:17 PM	Helium MFC set to  20.000000
8/23/2012	2:04:17 PM	H2 MFC set to  0.000000
8/23/2012	2:04:17 PM	BCl3 MFC set to  0.000000
8/23/2012	2:04:17 PM	PH3 MFC set to  0.000000
8/23/2012	2:04:17 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:04:17 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:04:18 PM	Tube furnace set to 0
8/23/2012	2:04:48 PM	Helium valve closed
8/23/2012	2:04:48 PM	H2 valve closed
8/23/2012	2:04:48 PM	BCl3 valve closed
8/23/2012	2:04:48 PM	PH3 valve closed
8/23/2012	2:04:48 PM	SiCl4 pre valve closed
8/23/2012	2:04:48 PM	SiCl4 post valve closed
8/23/2012	2:04:48 PM	Bypass valve closed
8/23/2012	2:04:48 PM	Bubbler valve closed
8/23/2012	2:04:48 PM	Main Vac valve opened
8/23/2012	2:04:48 PM	Helium MFC set to  0.000000
8/23/2012	2:04:48 PM	H2 MFC set to  0.000000
8/23/2012	2:04:48 PM	BCl3 MFC set to  0.000000
8/23/2012	2:04:48 PM	PH3 MFC set to  0.000000
8/23/2012	2:04:48 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:04:48 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:04:48 PM	Tube furnace set to 0
8/23/2012	2:05:18 PM	H2 valve closed
8/23/2012	2:05:18 PM	BCl3 valve closed
8/23/2012	2:05:18 PM	PH3 valve closed
8/23/2012	2:05:18 PM	SiCl4 pre valve closed
8/23/2012	2:05:18 PM	SiCl4 post valve closed
8/23/2012	2:05:18 PM	Bypass valve closed
8/23/2012	2:05:18 PM	Bubbler valve closed
8/23/2012	2:05:18 PM	Helium valve opened
8/23/2012	2:05:18 PM	Main Vac valve opened
8/23/2012	2:05:18 PM	Helium MFC set to  20.000000
8/23/2012	2:05:18 PM	H2 MFC set to  0.000000
8/23/2012	2:05:18 PM	BCl3 MFC set to  0.000000
8/23/2012	2:05:18 PM	PH3 MFC set to  0.000000
8/23/2012	2:05:18 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:05:18 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:05:18 PM	Tube furnace set to 0
8/23/2012	2:05:48 PM	Helium valve closed
8/23/2012	2:05:48 PM	H2 valve closed
8/23/2012	2:05:48 PM	BCl3 valve closed
8/23/2012	2:05:48 PM	PH3 valve closed
8/23/2012	2:05:48 PM	SiCl4 pre valve closed
8/23/2012	2:05:48 PM	SiCl4 post valve closed
8/23/2012	2:05:48 PM	Bypass valve closed
8/23/2012	2:05:48 PM	Bubbler valve closed
8/23/2012	2:05:48 PM	Main Vac valve opened
8/23/2012	2:05:48 PM	Helium MFC set to  0.000000
8/23/2012	2:05:48 PM	H2 MFC set to  0.000000
8/23/2012	2:05:48 PM	BCl3 MFC set to  0.000000
8/23/2012	2:05:48 PM	PH3 MFC set to  0.000000
8/23/2012	2:05:48 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:05:48 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:05:48 PM	Tube furnace set to 0
8/23/2012	2:06:18 PM	H2 valve closed
8/23/2012	2:06:18 PM	BCl3 valve closed
8/23/2012	2:06:18 PM	PH3 valve closed
8/23/2012	2:06:18 PM	SiCl4 pre valve closed
8/23/2012	2:06:18 PM	SiCl4 post valve closed
8/23/2012	2:06:18 PM	Bypass valve closed
8/23/2012	2:06:18 PM	Bubbler valve closed
8/23/2012	2:06:18 PM	Helium valve opened
8/23/2012	2:06:18 PM	Main Vac valve opened
8/23/2012	2:06:18 PM	Helium MFC set to  20.000000
8/23/2012	2:06:18 PM	H2 MFC set to  0.000000
8/23/2012	2:06:18 PM	BCl3 MFC set to  0.000000
8/23/2012	2:06:18 PM	PH3 MFC set to  0.000000
8/23/2012	2:06:18 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:06:18 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:06:18 PM	Tube furnace set to 0
8/23/2012	2:06:48 PM	Helium valve closed
8/23/2012	2:06:49 PM	H2 valve closed
8/23/2012	2:06:49 PM	BCl3 valve closed
8/23/2012	2:06:49 PM	PH3 valve closed
8/23/2012	2:06:49 PM	SiCl4 pre valve closed
8/23/2012	2:06:49 PM	SiCl4 post valve closed
8/23/2012	2:06:49 PM	Bypass valve closed
8/23/2012	2:06:49 PM	Bubbler valve closed
8/23/2012	2:06:49 PM	Main Vac valve opened
8/23/2012	2:06:49 PM	Helium MFC set to  0.000000
8/23/2012	2:06:49 PM	H2 MFC set to  0.000000
8/23/2012	2:06:49 PM	BCl3 MFC set to  0.000000
8/23/2012	2:06:49 PM	PH3 MFC set to  0.000000
8/23/2012	2:06:49 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:06:49 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:06:49 PM	Tube furnace set to 0
8/23/2012	2:07:19 PM	H2 valve closed
8/23/2012	2:07:19 PM	BCl3 valve closed
8/23/2012	2:07:19 PM	PH3 valve closed
8/23/2012	2:07:19 PM	SiCl4 pre valve closed
8/23/2012	2:07:19 PM	SiCl4 post valve closed
8/23/2012	2:07:19 PM	Bypass valve closed
8/23/2012	2:07:19 PM	Bubbler valve closed
8/23/2012	2:07:19 PM	Helium valve opened
8/23/2012	2:07:19 PM	Main Vac valve opened
8/23/2012	2:07:19 PM	Helium MFC set to  20.000000
8/23/2012	2:07:19 PM	H2 MFC set to  0.000000
8/23/2012	2:07:19 PM	BCl3 MFC set to  0.000000
8/23/2012	2:07:19 PM	PH3 MFC set to  0.000000
8/23/2012	2:07:19 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:07:19 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:07:19 PM	Tube furnace set to 0
8/23/2012	2:07:49 PM	Helium valve closed
8/23/2012	2:07:49 PM	H2 valve closed
8/23/2012	2:07:49 PM	BCl3 valve closed
8/23/2012	2:07:49 PM	PH3 valve closed
8/23/2012	2:07:49 PM	SiCl4 pre valve closed
8/23/2012	2:07:49 PM	SiCl4 post valve closed
8/23/2012	2:07:49 PM	Bypass valve closed
8/23/2012	2:07:49 PM	Bubbler valve closed
8/23/2012	2:07:49 PM	Main Vac valve opened
8/23/2012	2:07:49 PM	Helium MFC set to  0.000000
8/23/2012	2:07:49 PM	H2 MFC set to  0.000000
8/23/2012	2:07:49 PM	BCl3 MFC set to  0.000000
8/23/2012	2:07:49 PM	PH3 MFC set to  0.000000
8/23/2012	2:07:49 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:07:49 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:07:49 PM	Tube furnace set to 0
8/23/2012	2:08:19 PM	H2 valve closed
8/23/2012	2:08:19 PM	BCl3 valve closed
8/23/2012	2:08:19 PM	PH3 valve closed
8/23/2012	2:08:19 PM	SiCl4 pre valve closed
8/23/2012	2:08:19 PM	SiCl4 post valve closed
8/23/2012	2:08:19 PM	Bypass valve closed
8/23/2012	2:08:19 PM	Bubbler valve closed
8/23/2012	2:08:19 PM	Helium valve opened
8/23/2012	2:08:19 PM	Main Vac valve opened
8/23/2012	2:08:19 PM	Helium MFC set to  20.000000
8/23/2012	2:08:19 PM	H2 MFC set to  0.000000
8/23/2012	2:08:19 PM	BCl3 MFC set to  0.000000
8/23/2012	2:08:19 PM	PH3 MFC set to  0.000000
8/23/2012	2:08:19 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:08:19 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:08:19 PM	Tube furnace set to 0
8/23/2012	2:08:49 PM	Helium valve closed
8/23/2012	2:08:49 PM	H2 valve closed
8/23/2012	2:08:49 PM	BCl3 valve closed
8/23/2012	2:08:49 PM	PH3 valve closed
8/23/2012	2:08:49 PM	SiCl4 pre valve closed
8/23/2012	2:08:49 PM	SiCl4 post valve closed
8/23/2012	2:08:49 PM	Bypass valve closed
8/23/2012	2:08:49 PM	Bubbler valve closed
8/23/2012	2:08:49 PM	Main Vac valve opened
8/23/2012	2:08:49 PM	Helium MFC set to  0.000000
8/23/2012	2:08:49 PM	H2 MFC set to  0.000000
8/23/2012	2:08:49 PM	BCl3 MFC set to  0.000000
8/23/2012	2:08:49 PM	PH3 MFC set to  0.000000
8/23/2012	2:08:50 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:08:50 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:08:50 PM	Tube furnace set to 0
8/23/2012	2:09:20 PM	H2 valve closed
8/23/2012	2:09:20 PM	BCl3 valve closed
8/23/2012	2:09:20 PM	PH3 valve closed
8/23/2012	2:09:20 PM	SiCl4 pre valve closed
8/23/2012	2:09:20 PM	SiCl4 post valve closed
8/23/2012	2:09:20 PM	Bypass valve closed
8/23/2012	2:09:20 PM	Bubbler valve closed
8/23/2012	2:09:20 PM	Helium valve opened
8/23/2012	2:09:20 PM	Main Vac valve opened
8/23/2012	2:09:20 PM	Helium MFC set to  20.000000
8/23/2012	2:09:20 PM	H2 MFC set to  0.000000
8/23/2012	2:09:20 PM	BCl3 MFC set to  0.000000
8/23/2012	2:09:20 PM	PH3 MFC set to  0.000000
8/23/2012	2:09:20 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:09:20 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:09:20 PM	Tube furnace set to 0
8/23/2012	2:09:50 PM	Helium valve closed
8/23/2012	2:09:50 PM	H2 valve closed
8/23/2012	2:09:50 PM	BCl3 valve closed
8/23/2012	2:09:50 PM	PH3 valve closed
8/23/2012	2:09:50 PM	SiCl4 pre valve closed
8/23/2012	2:09:50 PM	SiCl4 post valve closed
8/23/2012	2:09:50 PM	Bypass valve closed
8/23/2012	2:09:50 PM	Bubbler valve closed
8/23/2012	2:09:50 PM	Main Vac valve opened
8/23/2012	2:09:50 PM	Helium MFC set to  0.000000
8/23/2012	2:09:50 PM	H2 MFC set to  0.000000
8/23/2012	2:09:50 PM	BCl3 MFC set to  0.000000
8/23/2012	2:09:50 PM	PH3 MFC set to  0.000000
8/23/2012	2:09:50 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:09:50 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:09:50 PM	Tube furnace set to 0
8/23/2012	2:10:20 PM	H2 valve closed
8/23/2012	2:10:20 PM	BCl3 valve closed
8/23/2012	2:10:20 PM	PH3 valve closed
8/23/2012	2:10:20 PM	SiCl4 pre valve closed
8/23/2012	2:10:20 PM	SiCl4 post valve closed
8/23/2012	2:10:20 PM	Bypass valve closed
8/23/2012	2:10:20 PM	Bubbler valve closed
8/23/2012	2:10:20 PM	Helium valve opened
8/23/2012	2:10:20 PM	Main Vac valve opened
8/23/2012	2:10:20 PM	Helium MFC set to  20.000000
8/23/2012	2:10:20 PM	H2 MFC set to  0.000000
8/23/2012	2:10:20 PM	BCl3 MFC set to  0.000000
8/23/2012	2:10:20 PM	PH3 MFC set to  0.000000
8/23/2012	2:10:20 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:10:20 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:10:20 PM	Tube furnace set to 0
8/23/2012	2:10:50 PM	Helium valve closed
8/23/2012	2:10:50 PM	H2 valve closed
8/23/2012	2:10:50 PM	BCl3 valve closed
8/23/2012	2:10:50 PM	PH3 valve closed
8/23/2012	2:10:50 PM	SiCl4 pre valve closed
8/23/2012	2:10:50 PM	SiCl4 post valve closed
8/23/2012	2:10:50 PM	Bypass valve closed
8/23/2012	2:10:50 PM	Bubbler valve closed
8/23/2012	2:10:50 PM	Main Vac valve opened
8/23/2012	2:10:50 PM	Helium MFC set to  0.000000
8/23/2012	2:10:50 PM	H2 MFC set to  0.000000
8/23/2012	2:10:50 PM	BCl3 MFC set to  0.000000
8/23/2012	2:10:50 PM	PH3 MFC set to  0.000000
8/23/2012	2:10:50 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:10:50 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:10:51 PM	Tube furnace set to 0
8/23/2012	2:10:52 PM	Run finished at 2:10 PM
8/23/2012	2:10:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2012	2:22:50 PM	Recipe started at 2:22 PM
8/23/2012	2:22:50 PM	Helium valve closed
8/23/2012	2:22:50 PM	H2 valve closed
8/23/2012	2:22:50 PM	BCl3 valve closed
8/23/2012	2:22:50 PM	PH3 valve closed
8/23/2012	2:22:50 PM	SiCl4 pre valve closed
8/23/2012	2:22:50 PM	SiCl4 post valve closed
8/23/2012	2:22:50 PM	Main Vac valve closed
8/23/2012	2:22:50 PM	Bypass valve closed
8/23/2012	2:22:50 PM	Bubbler valve closed
8/23/2012	2:22:50 PM	Helium MFC set to  0.000000
8/23/2012	2:22:50 PM	H2 MFC set to  0.000000
8/23/2012	2:22:50 PM	BCl3 MFC set to  0.000000
8/23/2012	2:22:50 PM	PH3 MFC set to  0.000000
8/23/2012	2:22:50 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:22:50 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:22:50 PM	Tube furnace set to 0
8/23/2012	2:22:53 PM	Helium valve closed
8/23/2012	2:22:53 PM	BCl3 valve closed
8/23/2012	2:22:53 PM	PH3 valve closed
8/23/2012	2:22:53 PM	SiCl4 pre valve closed
8/23/2012	2:22:53 PM	SiCl4 post valve closed
8/23/2012	2:22:53 PM	Main Vac valve closed
8/23/2012	2:22:53 PM	Bypass valve closed
8/23/2012	2:22:53 PM	Bubbler valve closed
8/23/2012	2:22:53 PM	H2 valve opened
8/23/2012	2:22:53 PM	Helium MFC set to  0.000000
8/23/2012	2:22:53 PM	H2 MFC set to  500.000000
8/23/2012	2:22:53 PM	BCl3 MFC set to  0.000000
8/23/2012	2:22:53 PM	PH3 MFC set to  0.000000
8/23/2012	2:22:53 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:22:53 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:22:53 PM	Tube furnace set to 0
8/23/2012	2:24:09 PM	Helium valve closed
8/23/2012	2:24:09 PM	BCl3 valve closed
8/23/2012	2:24:09 PM	PH3 valve closed
8/23/2012	2:24:09 PM	SiCl4 pre valve closed
8/23/2012	2:24:10 PM	SiCl4 post valve closed
8/23/2012	2:24:10 PM	Main Vac valve closed
8/23/2012	2:24:10 PM	Bypass valve closed
8/23/2012	2:24:10 PM	H2 valve opened
8/23/2012	2:24:10 PM	Bubbler valve opened
8/23/2012	2:24:10 PM	Helium MFC set to  0.000000
8/23/2012	2:24:10 PM	H2 MFC set to  500.000000
8/23/2012	2:24:10 PM	BCl3 MFC set to  0.000000
8/23/2012	2:24:10 PM	PH3 MFC set to  0.000000
8/23/2012	2:24:10 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:24:10 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:24:10 PM	Tube furnace set to 0
8/23/2012	2:24:11 PM	Helium valve closed
8/23/2012	2:24:11 PM	BCl3 valve closed
8/23/2012	2:24:11 PM	PH3 valve closed
8/23/2012	2:24:11 PM	SiCl4 pre valve closed
8/23/2012	2:24:11 PM	SiCl4 post valve closed
8/23/2012	2:24:11 PM	Main Vac valve closed
8/23/2012	2:24:11 PM	Bypass valve closed
8/23/2012	2:24:11 PM	H2 valve opened
8/23/2012	2:24:11 PM	Bubbler valve opened
8/23/2012	2:24:11 PM	Helium MFC set to  0.000000
8/23/2012	2:24:11 PM	H2 MFC set to  500.000000
8/23/2012	2:24:11 PM	BCl3 MFC set to  0.000000
8/23/2012	2:24:11 PM	PH3 MFC set to  0.000000
8/23/2012	2:24:11 PM	SiCl4 MFC set to  0.000000
8/23/2012	2:24:11 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:24:11 PM	Tube furnace set to 1000
8/23/2012	2:44:11 PM	Helium valve closed
8/23/2012	2:44:11 PM	PH3 valve closed
8/23/2012	2:44:11 PM	Main Vac valve closed
8/23/2012	2:44:12 PM	Bypass valve closed
8/23/2012	2:44:12 PM	H2 valve opened
8/23/2012	2:44:12 PM	BCl3 valve opened
8/23/2012	2:44:12 PM	SiCl4 pre valve opened
8/23/2012	2:44:12 PM	SiCl4 post valve opened
8/23/2012	2:44:12 PM	Bubbler valve opened
8/23/2012	2:44:12 PM	Helium MFC set to  0.000000
8/23/2012	2:44:12 PM	H2 MFC set to  450.000000
8/23/2012	2:44:12 PM	BCl3 MFC set to  1.300000
8/23/2012	2:44:12 PM	PH3 MFC set to  0.000000
8/23/2012	2:44:13 PM	SiCl4 MFC set to  50.000000
8/23/2012	2:44:13 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	2:44:13 PM	Tube furnace set to 1000
8/23/2012	3:01:11 PM	Helium valve closed
8/23/2012	3:01:11 PM	BCl3 valve closed
8/23/2012	3:01:11 PM	PH3 valve closed
8/23/2012	3:01:11 PM	SiCl4 pre valve closed
8/23/2012	3:01:11 PM	SiCl4 post valve closed
8/23/2012	3:01:11 PM	Main Vac valve closed
8/23/2012	3:01:11 PM	Bypass valve closed
8/23/2012	3:01:11 PM	H2 valve opened
8/23/2012	3:01:11 PM	Bubbler valve opened
8/23/2012	3:01:11 PM	Helium MFC set to  0.000000
8/23/2012	3:01:11 PM	H2 MFC set to  500.000000
8/23/2012	3:01:11 PM	BCl3 MFC set to  0.000000
8/23/2012	3:01:11 PM	PH3 MFC set to  0.000000
8/23/2012	3:01:11 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:01:11 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:01:11 PM	Tube furnace set to 750
8/23/2012	3:06:11 PM	H2 valve closed
8/23/2012	3:06:11 PM	BCl3 valve closed
8/23/2012	3:06:11 PM	PH3 valve closed
8/23/2012	3:06:11 PM	SiCl4 pre valve closed
8/23/2012	3:06:11 PM	SiCl4 post valve closed
8/23/2012	3:06:11 PM	Main Vac valve closed
8/23/2012	3:06:11 PM	Bypass valve closed
8/23/2012	3:06:11 PM	Helium valve opened
8/23/2012	3:06:11 PM	Bubbler valve opened
8/23/2012	3:06:11 PM	Helium MFC set to  500.000000
8/23/2012	3:06:11 PM	H2 MFC set to  0.000000
8/23/2012	3:06:11 PM	BCl3 MFC set to  0.000000
8/23/2012	3:06:11 PM	PH3 MFC set to  0.000000
8/23/2012	3:06:11 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:06:11 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:06:12 PM	Tube furnace set to 0
8/23/2012	3:18:14 PM	Helium valve closed
8/23/2012	3:18:14 PM	H2 valve closed
8/23/2012	3:18:14 PM	BCl3 valve closed
8/23/2012	3:18:14 PM	PH3 valve closed
8/23/2012	3:18:14 PM	SiCl4 pre valve closed
8/23/2012	3:18:14 PM	SiCl4 post valve closed
8/23/2012	3:18:14 PM	Main Vac valve closed
8/23/2012	3:18:14 PM	Bypass valve closed
8/23/2012	3:18:14 PM	Bubbler valve closed
8/23/2012	3:18:14 PM	Helium MFC set to  0.000000
8/23/2012	3:18:14 PM	H2 MFC set to  0.000000
8/23/2012	3:18:14 PM	BCl3 MFC set to  0.000000
8/23/2012	3:18:14 PM	PH3 MFC set to  0.000000
8/23/2012	3:18:14 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:18:14 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:18:14 PM	Tube furnace set to 0
8/23/2012	3:18:15 PM	Run finished at 3:18 PM
8/23/2012	3:18:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/23/2012	3:18:19 PM	Recipe started at 3:18 PM
8/23/2012	3:18:19 PM	Helium valve closed
8/23/2012	3:18:19 PM	H2 valve closed
8/23/2012	3:18:19 PM	BCl3 valve closed
8/23/2012	3:18:19 PM	PH3 valve closed
8/23/2012	3:18:19 PM	SiCl4 pre valve closed
8/23/2012	3:18:19 PM	SiCl4 post valve closed
8/23/2012	3:18:19 PM	Main Vac valve closed
8/23/2012	3:18:19 PM	Bypass valve closed
8/23/2012	3:18:19 PM	Bubbler valve closed
8/23/2012	3:18:19 PM	Helium MFC set to  0.000000
8/23/2012	3:18:19 PM	H2 MFC set to  0.000000
8/23/2012	3:18:19 PM	BCl3 MFC set to  0.000000
8/23/2012	3:18:19 PM	PH3 MFC set to  0.000000
8/23/2012	3:18:19 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:18:19 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:18:19 PM	Tube furnace set to 0
8/23/2012	3:18:22 PM	H2 valve closed
8/23/2012	3:18:22 PM	BCl3 valve closed
8/23/2012	3:18:22 PM	PH3 valve closed
8/23/2012	3:18:22 PM	SiCl4 pre valve closed
8/23/2012	3:18:22 PM	SiCl4 post valve closed
8/23/2012	3:18:22 PM	Main Vac valve closed
8/23/2012	3:18:22 PM	Bypass valve closed
8/23/2012	3:18:22 PM	Bubbler valve closed
8/23/2012	3:18:22 PM	Helium valve opened
8/23/2012	3:18:22 PM	Helium MFC set to  500.000000
8/23/2012	3:18:22 PM	H2 MFC set to  0.000000
8/23/2012	3:18:22 PM	BCl3 MFC set to  0.000000
8/23/2012	3:18:22 PM	PH3 MFC set to  0.000000
8/23/2012	3:18:22 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:18:22 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:18:22 PM	Tube furnace set to 0
8/23/2012	3:18:22 PM	Helium valve closed
8/23/2012	3:18:22 PM	H2 valve closed
8/23/2012	3:18:22 PM	BCl3 valve closed
8/23/2012	3:18:22 PM	PH3 valve closed
8/23/2012	3:18:22 PM	SiCl4 pre valve closed
8/23/2012	3:18:22 PM	SiCl4 post valve closed
8/23/2012	3:18:22 PM	Main Vac valve closed
8/23/2012	3:18:22 PM	Bypass valve closed
8/23/2012	3:18:22 PM	Bubbler valve closed
8/23/2012	3:18:22 PM	Helium MFC set to  0.000000
8/23/2012	3:18:22 PM	H2 MFC set to  0.000000
8/23/2012	3:18:22 PM	BCl3 MFC set to  0.000000
8/23/2012	3:18:22 PM	PH3 MFC set to  0.000000
8/23/2012	3:18:22 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:18:22 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:18:22 PM	Tube furnace set to 0
8/23/2012	3:18:23 PM	Run finished at 3:18 PM
8/23/2012	3:18:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/23/2012	3:21:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2012	3:21:13 PM	Recipe started at 3:21 PM
8/23/2012	3:21:13 PM	Helium valve closed
8/23/2012	3:21:13 PM	H2 valve closed
8/23/2012	3:21:13 PM	BCl3 valve closed
8/23/2012	3:21:13 PM	PH3 valve closed
8/23/2012	3:21:13 PM	SiCl4 pre valve closed
8/23/2012	3:21:13 PM	SiCl4 post valve closed
8/23/2012	3:21:13 PM	Main Vac valve closed
8/23/2012	3:21:13 PM	Bubbler valve closed
8/23/2012	3:21:13 PM	Bypass valve opened
8/23/2012	3:21:13 PM	Helium MFC set to  0.000000
8/23/2012	3:21:13 PM	H2 MFC set to  0.000000
8/23/2012	3:21:13 PM	BCl3 MFC set to  0.000000
8/23/2012	3:21:13 PM	PH3 MFC set to  0.000000
8/23/2012	3:21:13 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:21:13 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:21:13 PM	Tube furnace set to 0
8/23/2012	3:22:26 PM	Helium valve closed
8/23/2012	3:22:26 PM	H2 valve closed
8/23/2012	3:22:26 PM	BCl3 valve closed
8/23/2012	3:22:26 PM	PH3 valve closed
8/23/2012	3:22:26 PM	SiCl4 pre valve closed
8/23/2012	3:22:26 PM	SiCl4 post valve closed
8/23/2012	3:22:26 PM	Main Vac valve closed
8/23/2012	3:22:26 PM	Bubbler valve closed
8/23/2012	3:22:26 PM	Bypass valve opened
8/23/2012	3:22:26 PM	Helium MFC set to  0.000000
8/23/2012	3:22:26 PM	H2 MFC set to  0.000000
8/23/2012	3:22:26 PM	BCl3 MFC set to  0.000000
8/23/2012	3:22:26 PM	PH3 MFC set to  0.000000
8/23/2012	3:22:26 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:22:26 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:22:26 PM	Tube furnace set to 0
8/23/2012	3:23:26 PM	Helium valve closed
8/23/2012	3:23:26 PM	H2 valve closed
8/23/2012	3:23:26 PM	BCl3 valve closed
8/23/2012	3:23:26 PM	PH3 valve closed
8/23/2012	3:23:26 PM	SiCl4 pre valve closed
8/23/2012	3:23:26 PM	SiCl4 post valve closed
8/23/2012	3:23:26 PM	Bypass valve closed
8/23/2012	3:23:26 PM	Bubbler valve closed
8/23/2012	3:23:26 PM	Main Vac valve opened
8/23/2012	3:23:26 PM	Helium MFC set to  0.000000
8/23/2012	3:23:26 PM	H2 MFC set to  0.000000
8/23/2012	3:23:26 PM	BCl3 MFC set to  0.000000
8/23/2012	3:23:26 PM	PH3 MFC set to  0.000000
8/23/2012	3:23:26 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:23:26 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:23:26 PM	Tube furnace set to 0
8/23/2012	3:23:27 PM	Run finished at 3:23 PM
8/23/2012	3:23:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2012	3:58:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2012	3:58:53 PM	Recipe started at 3:58 PM
8/23/2012	3:58:53 PM	Helium valve closed
8/23/2012	3:58:53 PM	H2 valve closed
8/23/2012	3:58:53 PM	BCl3 valve closed
8/23/2012	3:58:53 PM	PH3 valve closed
8/23/2012	3:58:53 PM	SiCl4 pre valve closed
8/23/2012	3:58:53 PM	SiCl4 post valve closed
8/23/2012	3:58:53 PM	Main Vac valve closed
8/23/2012	3:58:53 PM	Bubbler valve closed
8/23/2012	3:58:53 PM	Bypass valve opened
8/23/2012	3:58:53 PM	Helium MFC set to  0.000000
8/23/2012	3:58:53 PM	H2 MFC set to  0.000000
8/23/2012	3:58:53 PM	BCl3 MFC set to  0.000000
8/23/2012	3:58:53 PM	PH3 MFC set to  0.000000
8/23/2012	3:58:53 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:58:53 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:58:53 PM	Tube furnace set to 0
8/23/2012	3:58:53 PM	Helium valve closed
8/23/2012	3:58:53 PM	H2 valve closed
8/23/2012	3:58:53 PM	BCl3 valve closed
8/23/2012	3:58:53 PM	PH3 valve closed
8/23/2012	3:58:53 PM	SiCl4 pre valve closed
8/23/2012	3:58:53 PM	SiCl4 post valve closed
8/23/2012	3:58:53 PM	Main Vac valve closed
8/23/2012	3:58:53 PM	Bubbler valve closed
8/23/2012	3:58:53 PM	Bypass valve opened
8/23/2012	3:58:53 PM	Helium MFC set to  0.000000
8/23/2012	3:58:53 PM	H2 MFC set to  0.000000
8/23/2012	3:58:53 PM	BCl3 MFC set to  0.000000
8/23/2012	3:58:53 PM	PH3 MFC set to  0.000000
8/23/2012	3:58:53 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:58:53 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:58:54 PM	Tube furnace set to 0
8/23/2012	3:58:57 PM	Helium valve closed
8/23/2012	3:58:57 PM	H2 valve closed
8/23/2012	3:58:57 PM	BCl3 valve closed
8/23/2012	3:58:57 PM	PH3 valve closed
8/23/2012	3:58:57 PM	SiCl4 pre valve closed
8/23/2012	3:58:57 PM	SiCl4 post valve closed
8/23/2012	3:58:57 PM	Bypass valve closed
8/23/2012	3:58:57 PM	Bubbler valve closed
8/23/2012	3:58:57 PM	Main Vac valve opened
8/23/2012	3:58:57 PM	Helium MFC set to  0.000000
8/23/2012	3:58:57 PM	H2 MFC set to  0.000000
8/23/2012	3:58:57 PM	BCl3 MFC set to  0.000000
8/23/2012	3:58:57 PM	PH3 MFC set to  0.000000
8/23/2012	3:58:57 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:58:57 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:58:57 PM	Tube furnace set to 0
8/23/2012	3:58:58 PM	H2 valve closed
8/23/2012	3:58:58 PM	BCl3 valve closed
8/23/2012	3:58:58 PM	PH3 valve closed
8/23/2012	3:58:58 PM	SiCl4 pre valve closed
8/23/2012	3:58:58 PM	SiCl4 post valve closed
8/23/2012	3:58:58 PM	Bypass valve closed
8/23/2012	3:58:58 PM	Bubbler valve closed
8/23/2012	3:58:58 PM	Helium valve opened
8/23/2012	3:58:58 PM	Main Vac valve opened
8/23/2012	3:58:58 PM	Helium MFC set to  20.000000
8/23/2012	3:58:58 PM	H2 MFC set to  0.000000
8/23/2012	3:58:58 PM	BCl3 MFC set to  0.000000
8/23/2012	3:58:58 PM	PH3 MFC set to  0.000000
8/23/2012	3:58:58 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:58:58 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:58:58 PM	Tube furnace set to 0
8/23/2012	3:59:28 PM	Helium valve closed
8/23/2012	3:59:28 PM	H2 valve closed
8/23/2012	3:59:28 PM	BCl3 valve closed
8/23/2012	3:59:28 PM	PH3 valve closed
8/23/2012	3:59:28 PM	SiCl4 pre valve closed
8/23/2012	3:59:28 PM	SiCl4 post valve closed
8/23/2012	3:59:28 PM	Bypass valve closed
8/23/2012	3:59:28 PM	Bubbler valve closed
8/23/2012	3:59:28 PM	Main Vac valve opened
8/23/2012	3:59:28 PM	Helium MFC set to  0.000000
8/23/2012	3:59:28 PM	H2 MFC set to  0.000000
8/23/2012	3:59:28 PM	BCl3 MFC set to  0.000000
8/23/2012	3:59:28 PM	PH3 MFC set to  0.000000
8/23/2012	3:59:28 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:59:28 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:59:28 PM	Tube furnace set to 0
8/23/2012	3:59:58 PM	H2 valve closed
8/23/2012	3:59:58 PM	BCl3 valve closed
8/23/2012	3:59:58 PM	PH3 valve closed
8/23/2012	3:59:58 PM	SiCl4 pre valve closed
8/23/2012	3:59:58 PM	SiCl4 post valve closed
8/23/2012	3:59:58 PM	Bypass valve closed
8/23/2012	3:59:58 PM	Bubbler valve closed
8/23/2012	3:59:58 PM	Helium valve opened
8/23/2012	3:59:58 PM	Main Vac valve opened
8/23/2012	3:59:58 PM	Helium MFC set to  20.000000
8/23/2012	3:59:58 PM	H2 MFC set to  0.000000
8/23/2012	3:59:58 PM	BCl3 MFC set to  0.000000
8/23/2012	3:59:58 PM	PH3 MFC set to  0.000000
8/23/2012	3:59:58 PM	SiCl4 MFC set to  0.000000
8/23/2012	3:59:58 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	3:59:58 PM	Tube furnace set to 0
8/23/2012	4:00:28 PM	Helium valve closed
8/23/2012	4:00:28 PM	H2 valve closed
8/23/2012	4:00:28 PM	BCl3 valve closed
8/23/2012	4:00:28 PM	PH3 valve closed
8/23/2012	4:00:28 PM	SiCl4 pre valve closed
8/23/2012	4:00:28 PM	SiCl4 post valve closed
8/23/2012	4:00:28 PM	Bypass valve closed
8/23/2012	4:00:28 PM	Bubbler valve closed
8/23/2012	4:00:28 PM	Main Vac valve opened
8/23/2012	4:00:28 PM	Helium MFC set to  0.000000
8/23/2012	4:00:28 PM	H2 MFC set to  0.000000
8/23/2012	4:00:28 PM	BCl3 MFC set to  0.000000
8/23/2012	4:00:28 PM	PH3 MFC set to  0.000000
8/23/2012	4:00:28 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:00:28 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:00:29 PM	Tube furnace set to 0
8/23/2012	4:00:59 PM	H2 valve closed
8/23/2012	4:00:59 PM	BCl3 valve closed
8/23/2012	4:00:59 PM	PH3 valve closed
8/23/2012	4:00:59 PM	SiCl4 pre valve closed
8/23/2012	4:00:59 PM	SiCl4 post valve closed
8/23/2012	4:00:59 PM	Bypass valve closed
8/23/2012	4:00:59 PM	Bubbler valve closed
8/23/2012	4:00:59 PM	Helium valve opened
8/23/2012	4:00:59 PM	Main Vac valve opened
8/23/2012	4:00:59 PM	Helium MFC set to  20.000000
8/23/2012	4:00:59 PM	H2 MFC set to  0.000000
8/23/2012	4:00:59 PM	BCl3 MFC set to  0.000000
8/23/2012	4:00:59 PM	PH3 MFC set to  0.000000
8/23/2012	4:00:59 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:00:59 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:00:59 PM	Tube furnace set to 0
8/23/2012	4:01:29 PM	Helium valve closed
8/23/2012	4:01:29 PM	H2 valve closed
8/23/2012	4:01:29 PM	BCl3 valve closed
8/23/2012	4:01:29 PM	PH3 valve closed
8/23/2012	4:01:29 PM	SiCl4 pre valve closed
8/23/2012	4:01:29 PM	SiCl4 post valve closed
8/23/2012	4:01:29 PM	Bypass valve closed
8/23/2012	4:01:29 PM	Bubbler valve closed
8/23/2012	4:01:29 PM	Main Vac valve opened
8/23/2012	4:01:29 PM	Helium MFC set to  0.000000
8/23/2012	4:01:29 PM	H2 MFC set to  0.000000
8/23/2012	4:01:29 PM	BCl3 MFC set to  0.000000
8/23/2012	4:01:29 PM	PH3 MFC set to  0.000000
8/23/2012	4:01:29 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:01:29 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:01:29 PM	Tube furnace set to 0
8/23/2012	4:01:59 PM	H2 valve closed
8/23/2012	4:01:59 PM	BCl3 valve closed
8/23/2012	4:01:59 PM	PH3 valve closed
8/23/2012	4:01:59 PM	SiCl4 pre valve closed
8/23/2012	4:01:59 PM	SiCl4 post valve closed
8/23/2012	4:01:59 PM	Bypass valve closed
8/23/2012	4:01:59 PM	Bubbler valve closed
8/23/2012	4:01:59 PM	Helium valve opened
8/23/2012	4:01:59 PM	Main Vac valve opened
8/23/2012	4:01:59 PM	Helium MFC set to  20.000000
8/23/2012	4:01:59 PM	H2 MFC set to  0.000000
8/23/2012	4:01:59 PM	BCl3 MFC set to  0.000000
8/23/2012	4:01:59 PM	PH3 MFC set to  0.000000
8/23/2012	4:01:59 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:01:59 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:01:59 PM	Tube furnace set to 0
8/23/2012	4:02:29 PM	Helium valve closed
8/23/2012	4:02:29 PM	H2 valve closed
8/23/2012	4:02:29 PM	BCl3 valve closed
8/23/2012	4:02:29 PM	PH3 valve closed
8/23/2012	4:02:29 PM	SiCl4 pre valve closed
8/23/2012	4:02:29 PM	SiCl4 post valve closed
8/23/2012	4:02:29 PM	Bypass valve closed
8/23/2012	4:02:29 PM	Bubbler valve closed
8/23/2012	4:02:29 PM	Main Vac valve opened
8/23/2012	4:02:29 PM	Helium MFC set to  0.000000
8/23/2012	4:02:29 PM	H2 MFC set to  0.000000
8/23/2012	4:02:29 PM	BCl3 MFC set to  0.000000
8/23/2012	4:02:29 PM	PH3 MFC set to  0.000000
8/23/2012	4:02:29 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:02:29 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:02:29 PM	Tube furnace set to 0
8/23/2012	4:02:59 PM	H2 valve closed
8/23/2012	4:02:59 PM	BCl3 valve closed
8/23/2012	4:02:59 PM	PH3 valve closed
8/23/2012	4:03:00 PM	SiCl4 pre valve closed
8/23/2012	4:03:00 PM	SiCl4 post valve closed
8/23/2012	4:03:00 PM	Bypass valve closed
8/23/2012	4:03:00 PM	Bubbler valve closed
8/23/2012	4:03:00 PM	Helium valve opened
8/23/2012	4:03:00 PM	Main Vac valve opened
8/23/2012	4:03:00 PM	Helium MFC set to  20.000000
8/23/2012	4:03:00 PM	H2 MFC set to  0.000000
8/23/2012	4:03:00 PM	BCl3 MFC set to  0.000000
8/23/2012	4:03:00 PM	PH3 MFC set to  0.000000
8/23/2012	4:03:00 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:03:00 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:03:00 PM	Tube furnace set to 0
8/23/2012	4:03:30 PM	Helium valve closed
8/23/2012	4:03:30 PM	H2 valve closed
8/23/2012	4:03:30 PM	BCl3 valve closed
8/23/2012	4:03:30 PM	PH3 valve closed
8/23/2012	4:03:30 PM	SiCl4 pre valve closed
8/23/2012	4:03:30 PM	SiCl4 post valve closed
8/23/2012	4:03:30 PM	Bypass valve closed
8/23/2012	4:03:30 PM	Bubbler valve closed
8/23/2012	4:03:30 PM	Main Vac valve opened
8/23/2012	4:03:30 PM	Helium MFC set to  0.000000
8/23/2012	4:03:30 PM	H2 MFC set to  0.000000
8/23/2012	4:03:30 PM	BCl3 MFC set to  0.000000
8/23/2012	4:03:30 PM	PH3 MFC set to  0.000000
8/23/2012	4:03:30 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:03:30 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:03:30 PM	Tube furnace set to 0
8/23/2012	4:04:00 PM	H2 valve closed
8/23/2012	4:04:00 PM	BCl3 valve closed
8/23/2012	4:04:00 PM	PH3 valve closed
8/23/2012	4:04:00 PM	SiCl4 pre valve closed
8/23/2012	4:04:00 PM	SiCl4 post valve closed
8/23/2012	4:04:00 PM	Bypass valve closed
8/23/2012	4:04:00 PM	Bubbler valve closed
8/23/2012	4:04:00 PM	Helium valve opened
8/23/2012	4:04:00 PM	Main Vac valve opened
8/23/2012	4:04:00 PM	Helium MFC set to  20.000000
8/23/2012	4:04:00 PM	H2 MFC set to  0.000000
8/23/2012	4:04:00 PM	BCl3 MFC set to  0.000000
8/23/2012	4:04:00 PM	PH3 MFC set to  0.000000
8/23/2012	4:04:00 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:04:00 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:04:00 PM	Tube furnace set to 0
8/23/2012	4:04:30 PM	Helium valve closed
8/23/2012	4:04:30 PM	H2 valve closed
8/23/2012	4:04:30 PM	BCl3 valve closed
8/23/2012	4:04:30 PM	PH3 valve closed
8/23/2012	4:04:30 PM	SiCl4 pre valve closed
8/23/2012	4:04:30 PM	SiCl4 post valve closed
8/23/2012	4:04:30 PM	Bypass valve closed
8/23/2012	4:04:30 PM	Bubbler valve closed
8/23/2012	4:04:30 PM	Main Vac valve opened
8/23/2012	4:04:30 PM	Helium MFC set to  0.000000
8/23/2012	4:04:30 PM	H2 MFC set to  0.000000
8/23/2012	4:04:30 PM	BCl3 MFC set to  0.000000
8/23/2012	4:04:30 PM	PH3 MFC set to  0.000000
8/23/2012	4:04:30 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:04:30 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:04:30 PM	Tube furnace set to 0
8/23/2012	4:05:00 PM	H2 valve closed
8/23/2012	4:05:00 PM	BCl3 valve closed
8/23/2012	4:05:00 PM	PH3 valve closed
8/23/2012	4:05:00 PM	SiCl4 pre valve closed
8/23/2012	4:05:00 PM	SiCl4 post valve closed
8/23/2012	4:05:00 PM	Bypass valve closed
8/23/2012	4:05:00 PM	Bubbler valve closed
8/23/2012	4:05:00 PM	Helium valve opened
8/23/2012	4:05:00 PM	Main Vac valve opened
8/23/2012	4:05:00 PM	Helium MFC set to  20.000000
8/23/2012	4:05:00 PM	H2 MFC set to  0.000000
8/23/2012	4:05:00 PM	BCl3 MFC set to  0.000000
8/23/2012	4:05:00 PM	PH3 MFC set to  0.000000
8/23/2012	4:05:01 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:05:01 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:05:01 PM	Tube furnace set to 0
8/23/2012	4:05:31 PM	Helium valve closed
8/23/2012	4:05:31 PM	H2 valve closed
8/23/2012	4:05:31 PM	BCl3 valve closed
8/23/2012	4:05:31 PM	PH3 valve closed
8/23/2012	4:05:31 PM	SiCl4 pre valve closed
8/23/2012	4:05:31 PM	SiCl4 post valve closed
8/23/2012	4:05:31 PM	Bypass valve closed
8/23/2012	4:05:31 PM	Bubbler valve closed
8/23/2012	4:05:31 PM	Main Vac valve opened
8/23/2012	4:05:31 PM	Helium MFC set to  0.000000
8/23/2012	4:05:31 PM	H2 MFC set to  0.000000
8/23/2012	4:05:31 PM	BCl3 MFC set to  0.000000
8/23/2012	4:05:31 PM	PH3 MFC set to  0.000000
8/23/2012	4:05:31 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:05:31 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:05:31 PM	Tube furnace set to 0
8/23/2012	4:06:01 PM	H2 valve closed
8/23/2012	4:06:01 PM	BCl3 valve closed
8/23/2012	4:06:01 PM	PH3 valve closed
8/23/2012	4:06:01 PM	SiCl4 pre valve closed
8/23/2012	4:06:01 PM	SiCl4 post valve closed
8/23/2012	4:06:01 PM	Bypass valve closed
8/23/2012	4:06:01 PM	Bubbler valve closed
8/23/2012	4:06:01 PM	Helium valve opened
8/23/2012	4:06:01 PM	Main Vac valve opened
8/23/2012	4:06:01 PM	Helium MFC set to  20.000000
8/23/2012	4:06:01 PM	H2 MFC set to  0.000000
8/23/2012	4:06:01 PM	BCl3 MFC set to  0.000000
8/23/2012	4:06:01 PM	PH3 MFC set to  0.000000
8/23/2012	4:06:01 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:06:01 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:06:01 PM	Tube furnace set to 0
8/23/2012	4:06:31 PM	Helium valve closed
8/23/2012	4:06:31 PM	H2 valve closed
8/23/2012	4:06:31 PM	BCl3 valve closed
8/23/2012	4:06:31 PM	PH3 valve closed
8/23/2012	4:06:31 PM	SiCl4 pre valve closed
8/23/2012	4:06:31 PM	SiCl4 post valve closed
8/23/2012	4:06:31 PM	Bypass valve closed
8/23/2012	4:06:31 PM	Bubbler valve closed
8/23/2012	4:06:31 PM	Main Vac valve opened
8/23/2012	4:06:31 PM	Helium MFC set to  0.000000
8/23/2012	4:06:31 PM	H2 MFC set to  0.000000
8/23/2012	4:06:31 PM	BCl3 MFC set to  0.000000
8/23/2012	4:06:31 PM	PH3 MFC set to  0.000000
8/23/2012	4:06:31 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:06:31 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:06:31 PM	Tube furnace set to 0
8/23/2012	4:07:01 PM	H2 valve closed
8/23/2012	4:07:01 PM	BCl3 valve closed
8/23/2012	4:07:01 PM	PH3 valve closed
8/23/2012	4:07:01 PM	SiCl4 pre valve closed
8/23/2012	4:07:01 PM	SiCl4 post valve closed
8/23/2012	4:07:01 PM	Bypass valve closed
8/23/2012	4:07:01 PM	Bubbler valve closed
8/23/2012	4:07:01 PM	Helium valve opened
8/23/2012	4:07:01 PM	Main Vac valve opened
8/23/2012	4:07:01 PM	Helium MFC set to  20.000000
8/23/2012	4:07:01 PM	H2 MFC set to  0.000000
8/23/2012	4:07:01 PM	BCl3 MFC set to  0.000000
8/23/2012	4:07:01 PM	PH3 MFC set to  0.000000
8/23/2012	4:07:01 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:07:01 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:07:02 PM	Tube furnace set to 0
8/23/2012	4:07:32 PM	Helium valve closed
8/23/2012	4:07:32 PM	H2 valve closed
8/23/2012	4:07:32 PM	BCl3 valve closed
8/23/2012	4:07:32 PM	PH3 valve closed
8/23/2012	4:07:32 PM	SiCl4 pre valve closed
8/23/2012	4:07:32 PM	SiCl4 post valve closed
8/23/2012	4:07:32 PM	Bypass valve closed
8/23/2012	4:07:32 PM	Bubbler valve closed
8/23/2012	4:07:32 PM	Main Vac valve opened
8/23/2012	4:07:32 PM	Helium MFC set to  0.000000
8/23/2012	4:07:32 PM	H2 MFC set to  0.000000
8/23/2012	4:07:32 PM	BCl3 MFC set to  0.000000
8/23/2012	4:07:32 PM	PH3 MFC set to  0.000000
8/23/2012	4:07:32 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:07:32 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:07:32 PM	Tube furnace set to 0
8/23/2012	4:08:02 PM	H2 valve closed
8/23/2012	4:08:02 PM	BCl3 valve closed
8/23/2012	4:08:02 PM	PH3 valve closed
8/23/2012	4:08:02 PM	SiCl4 pre valve closed
8/23/2012	4:08:02 PM	SiCl4 post valve closed
8/23/2012	4:08:02 PM	Bypass valve closed
8/23/2012	4:08:02 PM	Bubbler valve closed
8/23/2012	4:08:02 PM	Helium valve opened
8/23/2012	4:08:02 PM	Main Vac valve opened
8/23/2012	4:08:02 PM	Helium MFC set to  20.000000
8/23/2012	4:08:02 PM	H2 MFC set to  0.000000
8/23/2012	4:08:02 PM	BCl3 MFC set to  0.000000
8/23/2012	4:08:02 PM	PH3 MFC set to  0.000000
8/23/2012	4:08:02 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:08:02 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:08:02 PM	Tube furnace set to 0
8/23/2012	4:08:32 PM	Helium valve closed
8/23/2012	4:08:32 PM	H2 valve closed
8/23/2012	4:08:32 PM	BCl3 valve closed
8/23/2012	4:08:32 PM	PH3 valve closed
8/23/2012	4:08:32 PM	SiCl4 pre valve closed
8/23/2012	4:08:32 PM	SiCl4 post valve closed
8/23/2012	4:08:32 PM	Bypass valve closed
8/23/2012	4:08:32 PM	Bubbler valve closed
8/23/2012	4:08:32 PM	Main Vac valve opened
8/23/2012	4:08:32 PM	Helium MFC set to  0.000000
8/23/2012	4:08:32 PM	H2 MFC set to  0.000000
8/23/2012	4:08:32 PM	BCl3 MFC set to  0.000000
8/23/2012	4:08:32 PM	PH3 MFC set to  0.000000
8/23/2012	4:08:32 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:08:32 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:08:32 PM	Tube furnace set to 0
8/23/2012	4:08:33 PM	Run finished at 4:08 PM
8/23/2012	4:08:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2012	4:08:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2012	4:08:49 PM	Recipe started at 4:08 PM
8/23/2012	4:08:49 PM	Helium valve closed
8/23/2012	4:08:49 PM	H2 valve closed
8/23/2012	4:08:49 PM	BCl3 valve closed
8/23/2012	4:08:49 PM	PH3 valve closed
8/23/2012	4:08:49 PM	SiCl4 pre valve closed
8/23/2012	4:08:49 PM	SiCl4 post valve closed
8/23/2012	4:08:49 PM	Main Vac valve closed
8/23/2012	4:08:49 PM	Bubbler valve closed
8/23/2012	4:08:49 PM	Bypass valve opened
8/23/2012	4:08:49 PM	Helium MFC set to  0.000000
8/23/2012	4:08:49 PM	H2 MFC set to  0.000000
8/23/2012	4:08:49 PM	BCl3 MFC set to  0.000000
8/23/2012	4:08:49 PM	PH3 MFC set to  0.000000
8/23/2012	4:08:49 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:08:49 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:08:49 PM	Tube furnace set to 0
8/23/2012	4:08:50 PM	Helium valve closed
8/23/2012	4:08:50 PM	H2 valve closed
8/23/2012	4:08:50 PM	BCl3 valve closed
8/23/2012	4:08:50 PM	PH3 valve closed
8/23/2012	4:08:50 PM	SiCl4 pre valve closed
8/23/2012	4:08:50 PM	SiCl4 post valve closed
8/23/2012	4:08:50 PM	Main Vac valve closed
8/23/2012	4:08:50 PM	Bubbler valve closed
8/23/2012	4:08:50 PM	Bypass valve opened
8/23/2012	4:08:50 PM	Helium MFC set to  0.000000
8/23/2012	4:08:50 PM	H2 MFC set to  0.000000
8/23/2012	4:08:50 PM	BCl3 MFC set to  0.000000
8/23/2012	4:08:50 PM	PH3 MFC set to  0.000000
8/23/2012	4:08:50 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:08:50 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:08:50 PM	Tube furnace set to 0
8/23/2012	4:08:51 PM	Helium valve closed
8/23/2012	4:08:51 PM	H2 valve closed
8/23/2012	4:08:51 PM	BCl3 valve closed
8/23/2012	4:08:51 PM	PH3 valve closed
8/23/2012	4:08:51 PM	SiCl4 pre valve closed
8/23/2012	4:08:51 PM	SiCl4 post valve closed
8/23/2012	4:08:51 PM	Bypass valve closed
8/23/2012	4:08:51 PM	Bubbler valve closed
8/23/2012	4:08:52 PM	Main Vac valve opened
8/23/2012	4:08:52 PM	Helium MFC set to  0.000000
8/23/2012	4:08:52 PM	H2 MFC set to  0.000000
8/23/2012	4:08:52 PM	BCl3 MFC set to  0.000000
8/23/2012	4:08:52 PM	PH3 MFC set to  0.000000
8/23/2012	4:08:52 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:08:52 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:08:52 PM	Tube furnace set to 0
8/23/2012	4:08:53 PM	H2 valve closed
8/23/2012	4:08:53 PM	BCl3 valve closed
8/23/2012	4:08:53 PM	PH3 valve closed
8/23/2012	4:08:53 PM	SiCl4 pre valve closed
8/23/2012	4:08:53 PM	SiCl4 post valve closed
8/23/2012	4:08:53 PM	Bypass valve closed
8/23/2012	4:08:53 PM	Bubbler valve closed
8/23/2012	4:08:53 PM	Helium valve opened
8/23/2012	4:08:53 PM	Main Vac valve opened
8/23/2012	4:08:53 PM	Helium MFC set to  20.000000
8/23/2012	4:08:53 PM	H2 MFC set to  0.000000
8/23/2012	4:08:53 PM	BCl3 MFC set to  0.000000
8/23/2012	4:08:53 PM	PH3 MFC set to  0.000000
8/23/2012	4:08:53 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:08:53 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:08:53 PM	Tube furnace set to 0
8/23/2012	4:09:23 PM	Helium valve closed
8/23/2012	4:09:23 PM	H2 valve closed
8/23/2012	4:09:23 PM	BCl3 valve closed
8/23/2012	4:09:23 PM	PH3 valve closed
8/23/2012	4:09:23 PM	SiCl4 pre valve closed
8/23/2012	4:09:23 PM	SiCl4 post valve closed
8/23/2012	4:09:23 PM	Bypass valve closed
8/23/2012	4:09:23 PM	Bubbler valve closed
8/23/2012	4:09:23 PM	Main Vac valve opened
8/23/2012	4:09:23 PM	Helium MFC set to  0.000000
8/23/2012	4:09:23 PM	H2 MFC set to  0.000000
8/23/2012	4:09:23 PM	BCl3 MFC set to  0.000000
8/23/2012	4:09:23 PM	PH3 MFC set to  0.000000
8/23/2012	4:09:23 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:09:24 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:09:24 PM	Tube furnace set to 0
8/23/2012	4:09:54 PM	H2 valve closed
8/23/2012	4:09:54 PM	BCl3 valve closed
8/23/2012	4:09:54 PM	PH3 valve closed
8/23/2012	4:09:54 PM	SiCl4 pre valve closed
8/23/2012	4:09:54 PM	SiCl4 post valve closed
8/23/2012	4:09:54 PM	Bypass valve closed
8/23/2012	4:09:54 PM	Bubbler valve closed
8/23/2012	4:09:54 PM	Helium valve opened
8/23/2012	4:09:54 PM	Main Vac valve opened
8/23/2012	4:09:54 PM	Helium MFC set to  20.000000
8/23/2012	4:09:54 PM	H2 MFC set to  0.000000
8/23/2012	4:09:54 PM	BCl3 MFC set to  0.000000
8/23/2012	4:09:54 PM	PH3 MFC set to  0.000000
8/23/2012	4:09:54 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:09:54 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:09:54 PM	Tube furnace set to 0
8/23/2012	4:10:24 PM	Helium valve closed
8/23/2012	4:10:24 PM	H2 valve closed
8/23/2012	4:10:24 PM	BCl3 valve closed
8/23/2012	4:10:24 PM	PH3 valve closed
8/23/2012	4:10:24 PM	SiCl4 pre valve closed
8/23/2012	4:10:24 PM	SiCl4 post valve closed
8/23/2012	4:10:24 PM	Bypass valve closed
8/23/2012	4:10:24 PM	Bubbler valve closed
8/23/2012	4:10:24 PM	Main Vac valve opened
8/23/2012	4:10:24 PM	Helium MFC set to  0.000000
8/23/2012	4:10:24 PM	H2 MFC set to  0.000000
8/23/2012	4:10:24 PM	BCl3 MFC set to  0.000000
8/23/2012	4:10:24 PM	PH3 MFC set to  0.000000
8/23/2012	4:10:24 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:10:24 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:10:24 PM	Tube furnace set to 0
8/23/2012	4:10:54 PM	H2 valve closed
8/23/2012	4:10:54 PM	BCl3 valve closed
8/23/2012	4:10:54 PM	PH3 valve closed
8/23/2012	4:10:54 PM	SiCl4 pre valve closed
8/23/2012	4:10:54 PM	SiCl4 post valve closed
8/23/2012	4:10:54 PM	Bypass valve closed
8/23/2012	4:10:54 PM	Bubbler valve closed
8/23/2012	4:10:54 PM	Helium valve opened
8/23/2012	4:10:54 PM	Main Vac valve opened
8/23/2012	4:10:54 PM	Helium MFC set to  20.000000
8/23/2012	4:10:54 PM	H2 MFC set to  0.000000
8/23/2012	4:10:54 PM	BCl3 MFC set to  0.000000
8/23/2012	4:10:54 PM	PH3 MFC set to  0.000000
8/23/2012	4:10:54 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:10:54 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:10:54 PM	Tube furnace set to 0
8/23/2012	4:11:24 PM	Helium valve closed
8/23/2012	4:11:24 PM	H2 valve closed
8/23/2012	4:11:24 PM	BCl3 valve closed
8/23/2012	4:11:24 PM	PH3 valve closed
8/23/2012	4:11:24 PM	SiCl4 pre valve closed
8/23/2012	4:11:24 PM	SiCl4 post valve closed
8/23/2012	4:11:24 PM	Bypass valve closed
8/23/2012	4:11:24 PM	Bubbler valve closed
8/23/2012	4:11:24 PM	Main Vac valve opened
8/23/2012	4:11:24 PM	Helium MFC set to  0.000000
8/23/2012	4:11:24 PM	H2 MFC set to  0.000000
8/23/2012	4:11:24 PM	BCl3 MFC set to  0.000000
8/23/2012	4:11:24 PM	PH3 MFC set to  0.000000
8/23/2012	4:11:24 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:11:24 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:11:25 PM	Tube furnace set to 0
8/23/2012	4:11:55 PM	H2 valve closed
8/23/2012	4:11:55 PM	BCl3 valve closed
8/23/2012	4:11:55 PM	PH3 valve closed
8/23/2012	4:11:55 PM	SiCl4 pre valve closed
8/23/2012	4:11:55 PM	SiCl4 post valve closed
8/23/2012	4:11:55 PM	Bypass valve closed
8/23/2012	4:11:55 PM	Bubbler valve closed
8/23/2012	4:11:55 PM	Helium valve opened
8/23/2012	4:11:55 PM	Main Vac valve opened
8/23/2012	4:11:55 PM	Helium MFC set to  20.000000
8/23/2012	4:11:55 PM	H2 MFC set to  0.000000
8/23/2012	4:11:55 PM	BCl3 MFC set to  0.000000
8/23/2012	4:11:55 PM	PH3 MFC set to  0.000000
8/23/2012	4:11:55 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:11:55 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:11:55 PM	Tube furnace set to 0
8/23/2012	4:12:25 PM	Helium valve closed
8/23/2012	4:12:25 PM	H2 valve closed
8/23/2012	4:12:25 PM	BCl3 valve closed
8/23/2012	4:12:25 PM	PH3 valve closed
8/23/2012	4:12:25 PM	SiCl4 pre valve closed
8/23/2012	4:12:25 PM	SiCl4 post valve closed
8/23/2012	4:12:25 PM	Bypass valve closed
8/23/2012	4:12:25 PM	Bubbler valve closed
8/23/2012	4:12:25 PM	Main Vac valve opened
8/23/2012	4:12:25 PM	Helium MFC set to  0.000000
8/23/2012	4:12:25 PM	H2 MFC set to  0.000000
8/23/2012	4:12:25 PM	BCl3 MFC set to  0.000000
8/23/2012	4:12:25 PM	PH3 MFC set to  0.000000
8/23/2012	4:12:25 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:12:25 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:12:25 PM	Tube furnace set to 0
8/23/2012	4:12:55 PM	H2 valve closed
8/23/2012	4:12:55 PM	BCl3 valve closed
8/23/2012	4:12:55 PM	PH3 valve closed
8/23/2012	4:12:55 PM	SiCl4 pre valve closed
8/23/2012	4:12:55 PM	SiCl4 post valve closed
8/23/2012	4:12:55 PM	Bypass valve closed
8/23/2012	4:12:55 PM	Bubbler valve closed
8/23/2012	4:12:55 PM	Helium valve opened
8/23/2012	4:12:55 PM	Main Vac valve opened
8/23/2012	4:12:55 PM	Helium MFC set to  20.000000
8/23/2012	4:12:55 PM	H2 MFC set to  0.000000
8/23/2012	4:12:55 PM	BCl3 MFC set to  0.000000
8/23/2012	4:12:55 PM	PH3 MFC set to  0.000000
8/23/2012	4:12:55 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:12:55 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:12:55 PM	Tube furnace set to 0
8/23/2012	4:13:25 PM	Helium valve closed
8/23/2012	4:13:25 PM	H2 valve closed
8/23/2012	4:13:25 PM	BCl3 valve closed
8/23/2012	4:13:25 PM	PH3 valve closed
8/23/2012	4:13:25 PM	SiCl4 pre valve closed
8/23/2012	4:13:25 PM	SiCl4 post valve closed
8/23/2012	4:13:25 PM	Bypass valve closed
8/23/2012	4:13:25 PM	Bubbler valve closed
8/23/2012	4:13:25 PM	Main Vac valve opened
8/23/2012	4:13:25 PM	Helium MFC set to  0.000000
8/23/2012	4:13:25 PM	H2 MFC set to  0.000000
8/23/2012	4:13:25 PM	BCl3 MFC set to  0.000000
8/23/2012	4:13:25 PM	PH3 MFC set to  0.000000
8/23/2012	4:13:25 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:13:25 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:13:26 PM	Tube furnace set to 0
8/23/2012	4:13:56 PM	H2 valve closed
8/23/2012	4:13:56 PM	BCl3 valve closed
8/23/2012	4:13:56 PM	PH3 valve closed
8/23/2012	4:13:56 PM	SiCl4 pre valve closed
8/23/2012	4:13:56 PM	SiCl4 post valve closed
8/23/2012	4:13:56 PM	Bypass valve closed
8/23/2012	4:13:56 PM	Bubbler valve closed
8/23/2012	4:13:56 PM	Helium valve opened
8/23/2012	4:13:56 PM	Main Vac valve opened
8/23/2012	4:13:56 PM	Helium MFC set to  20.000000
8/23/2012	4:13:56 PM	H2 MFC set to  0.000000
8/23/2012	4:13:56 PM	BCl3 MFC set to  0.000000
8/23/2012	4:13:56 PM	PH3 MFC set to  0.000000
8/23/2012	4:13:56 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:13:56 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:13:56 PM	Tube furnace set to 0
8/23/2012	4:14:26 PM	Helium valve closed
8/23/2012	4:14:26 PM	H2 valve closed
8/23/2012	4:14:26 PM	BCl3 valve closed
8/23/2012	4:14:26 PM	PH3 valve closed
8/23/2012	4:14:26 PM	SiCl4 pre valve closed
8/23/2012	4:14:26 PM	SiCl4 post valve closed
8/23/2012	4:14:26 PM	Bypass valve closed
8/23/2012	4:14:26 PM	Bubbler valve closed
8/23/2012	4:14:26 PM	Main Vac valve opened
8/23/2012	4:14:26 PM	Helium MFC set to  0.000000
8/23/2012	4:14:26 PM	H2 MFC set to  0.000000
8/23/2012	4:14:26 PM	BCl3 MFC set to  0.000000
8/23/2012	4:14:26 PM	PH3 MFC set to  0.000000
8/23/2012	4:14:26 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:14:26 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:14:26 PM	Tube furnace set to 0
8/23/2012	4:14:56 PM	H2 valve closed
8/23/2012	4:14:56 PM	BCl3 valve closed
8/23/2012	4:14:56 PM	PH3 valve closed
8/23/2012	4:14:56 PM	SiCl4 pre valve closed
8/23/2012	4:14:56 PM	SiCl4 post valve closed
8/23/2012	4:14:56 PM	Bypass valve closed
8/23/2012	4:14:56 PM	Bubbler valve closed
8/23/2012	4:14:56 PM	Helium valve opened
8/23/2012	4:14:56 PM	Main Vac valve opened
8/23/2012	4:14:56 PM	Helium MFC set to  20.000000
8/23/2012	4:14:56 PM	H2 MFC set to  0.000000
8/23/2012	4:14:56 PM	BCl3 MFC set to  0.000000
8/23/2012	4:14:56 PM	PH3 MFC set to  0.000000
8/23/2012	4:14:56 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:14:56 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:14:56 PM	Tube furnace set to 0
8/23/2012	4:15:26 PM	Helium valve closed
8/23/2012	4:15:26 PM	H2 valve closed
8/23/2012	4:15:26 PM	BCl3 valve closed
8/23/2012	4:15:26 PM	PH3 valve closed
8/23/2012	4:15:26 PM	SiCl4 pre valve closed
8/23/2012	4:15:26 PM	SiCl4 post valve closed
8/23/2012	4:15:26 PM	Bypass valve closed
8/23/2012	4:15:26 PM	Bubbler valve closed
8/23/2012	4:15:26 PM	Main Vac valve opened
8/23/2012	4:15:26 PM	Helium MFC set to  0.000000
8/23/2012	4:15:26 PM	H2 MFC set to  0.000000
8/23/2012	4:15:26 PM	BCl3 MFC set to  0.000000
8/23/2012	4:15:26 PM	PH3 MFC set to  0.000000
8/23/2012	4:15:26 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:15:26 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:15:26 PM	Tube furnace set to 0
8/23/2012	4:15:56 PM	H2 valve closed
8/23/2012	4:15:56 PM	BCl3 valve closed
8/23/2012	4:15:57 PM	PH3 valve closed
8/23/2012	4:15:57 PM	SiCl4 pre valve closed
8/23/2012	4:15:57 PM	SiCl4 post valve closed
8/23/2012	4:15:57 PM	Bypass valve closed
8/23/2012	4:15:57 PM	Bubbler valve closed
8/23/2012	4:15:57 PM	Helium valve opened
8/23/2012	4:15:57 PM	Main Vac valve opened
8/23/2012	4:15:57 PM	Helium MFC set to  20.000000
8/23/2012	4:15:57 PM	H2 MFC set to  0.000000
8/23/2012	4:15:57 PM	BCl3 MFC set to  0.000000
8/23/2012	4:15:57 PM	PH3 MFC set to  0.000000
8/23/2012	4:15:57 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:15:57 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:15:57 PM	Tube furnace set to 0
8/23/2012	4:16:27 PM	Helium valve closed
8/23/2012	4:16:27 PM	H2 valve closed
8/23/2012	4:16:27 PM	BCl3 valve closed
8/23/2012	4:16:27 PM	PH3 valve closed
8/23/2012	4:16:27 PM	SiCl4 pre valve closed
8/23/2012	4:16:27 PM	SiCl4 post valve closed
8/23/2012	4:16:27 PM	Bypass valve closed
8/23/2012	4:16:27 PM	Bubbler valve closed
8/23/2012	4:16:27 PM	Main Vac valve opened
8/23/2012	4:16:27 PM	Helium MFC set to  0.000000
8/23/2012	4:16:27 PM	H2 MFC set to  0.000000
8/23/2012	4:16:27 PM	BCl3 MFC set to  0.000000
8/23/2012	4:16:27 PM	PH3 MFC set to  0.000000
8/23/2012	4:16:27 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:16:27 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:16:27 PM	Tube furnace set to 0
8/23/2012	4:16:57 PM	H2 valve closed
8/23/2012	4:16:57 PM	BCl3 valve closed
8/23/2012	4:16:57 PM	PH3 valve closed
8/23/2012	4:16:57 PM	SiCl4 pre valve closed
8/23/2012	4:16:57 PM	SiCl4 post valve closed
8/23/2012	4:16:57 PM	Bypass valve closed
8/23/2012	4:16:57 PM	Bubbler valve closed
8/23/2012	4:16:57 PM	Helium valve opened
8/23/2012	4:16:57 PM	Main Vac valve opened
8/23/2012	4:16:57 PM	Helium MFC set to  20.000000
8/23/2012	4:16:57 PM	H2 MFC set to  0.000000
8/23/2012	4:16:57 PM	BCl3 MFC set to  0.000000
8/23/2012	4:16:57 PM	PH3 MFC set to  0.000000
8/23/2012	4:16:57 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:16:57 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:16:57 PM	Tube furnace set to 0
8/23/2012	4:17:27 PM	Helium valve closed
8/23/2012	4:17:27 PM	H2 valve closed
8/23/2012	4:17:27 PM	BCl3 valve closed
8/23/2012	4:17:27 PM	PH3 valve closed
8/23/2012	4:17:27 PM	SiCl4 pre valve closed
8/23/2012	4:17:27 PM	SiCl4 post valve closed
8/23/2012	4:17:27 PM	Bypass valve closed
8/23/2012	4:17:27 PM	Bubbler valve closed
8/23/2012	4:17:27 PM	Main Vac valve opened
8/23/2012	4:17:27 PM	Helium MFC set to  0.000000
8/23/2012	4:17:27 PM	H2 MFC set to  0.000000
8/23/2012	4:17:27 PM	BCl3 MFC set to  0.000000
8/23/2012	4:17:27 PM	PH3 MFC set to  0.000000
8/23/2012	4:17:27 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:17:27 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:17:27 PM	Tube furnace set to 0
8/23/2012	4:17:57 PM	H2 valve closed
8/23/2012	4:17:57 PM	BCl3 valve closed
8/23/2012	4:17:57 PM	PH3 valve closed
8/23/2012	4:17:57 PM	SiCl4 pre valve closed
8/23/2012	4:17:57 PM	SiCl4 post valve closed
8/23/2012	4:17:57 PM	Bypass valve closed
8/23/2012	4:17:57 PM	Bubbler valve closed
8/23/2012	4:17:57 PM	Helium valve opened
8/23/2012	4:17:57 PM	Main Vac valve opened
8/23/2012	4:17:57 PM	Helium MFC set to  20.000000
8/23/2012	4:17:57 PM	H2 MFC set to  0.000000
8/23/2012	4:17:57 PM	BCl3 MFC set to  0.000000
8/23/2012	4:17:58 PM	PH3 MFC set to  0.000000
8/23/2012	4:17:58 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:17:58 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:17:58 PM	Tube furnace set to 0
8/23/2012	4:18:28 PM	Helium valve closed
8/23/2012	4:18:28 PM	H2 valve closed
8/23/2012	4:18:28 PM	BCl3 valve closed
8/23/2012	4:18:28 PM	PH3 valve closed
8/23/2012	4:18:28 PM	SiCl4 pre valve closed
8/23/2012	4:18:28 PM	SiCl4 post valve closed
8/23/2012	4:18:28 PM	Bypass valve closed
8/23/2012	4:18:28 PM	Bubbler valve closed
8/23/2012	4:18:28 PM	Main Vac valve opened
8/23/2012	4:18:28 PM	Helium MFC set to  0.000000
8/23/2012	4:18:28 PM	H2 MFC set to  0.000000
8/23/2012	4:18:28 PM	BCl3 MFC set to  0.000000
8/23/2012	4:18:28 PM	PH3 MFC set to  0.000000
8/23/2012	4:18:28 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:18:28 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:18:28 PM	Tube furnace set to 0
8/23/2012	4:18:29 PM	Run finished at 4:18 PM
8/23/2012	4:18:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2012	4:19:45 PM	Recipe started at 4:19 PM
8/23/2012	4:19:45 PM	Helium valve closed
8/23/2012	4:19:45 PM	H2 valve closed
8/23/2012	4:19:45 PM	BCl3 valve closed
8/23/2012	4:19:45 PM	PH3 valve closed
8/23/2012	4:19:45 PM	SiCl4 pre valve closed
8/23/2012	4:19:45 PM	SiCl4 post valve closed
8/23/2012	4:19:45 PM	Main Vac valve closed
8/23/2012	4:19:45 PM	Bypass valve closed
8/23/2012	4:19:45 PM	Bubbler valve closed
8/23/2012	4:19:45 PM	Helium MFC set to  0.000000
8/23/2012	4:19:45 PM	H2 MFC set to  0.000000
8/23/2012	4:19:45 PM	BCl3 MFC set to  0.000000
8/23/2012	4:19:45 PM	PH3 MFC set to  0.000000
8/23/2012	4:19:45 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:19:45 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:19:45 PM	Tube furnace set to 0
8/23/2012	4:19:48 PM	Helium valve closed
8/23/2012	4:19:48 PM	BCl3 valve closed
8/23/2012	4:19:48 PM	PH3 valve closed
8/23/2012	4:19:48 PM	SiCl4 pre valve closed
8/23/2012	4:19:48 PM	SiCl4 post valve closed
8/23/2012	4:19:48 PM	Main Vac valve closed
8/23/2012	4:19:48 PM	Bypass valve closed
8/23/2012	4:19:48 PM	Bubbler valve closed
8/23/2012	4:19:48 PM	H2 valve opened
8/23/2012	4:19:48 PM	Helium MFC set to  0.000000
8/23/2012	4:19:48 PM	H2 MFC set to  500.000000
8/23/2012	4:19:48 PM	BCl3 MFC set to  0.000000
8/23/2012	4:19:48 PM	PH3 MFC set to  0.000000
8/23/2012	4:19:48 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:19:48 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:19:48 PM	Tube furnace set to 0
8/23/2012	4:21:04 PM	Helium valve closed
8/23/2012	4:21:04 PM	BCl3 valve closed
8/23/2012	4:21:04 PM	PH3 valve closed
8/23/2012	4:21:04 PM	SiCl4 pre valve closed
8/23/2012	4:21:04 PM	SiCl4 post valve closed
8/23/2012	4:21:04 PM	Main Vac valve closed
8/23/2012	4:21:04 PM	Bypass valve closed
8/23/2012	4:21:04 PM	H2 valve opened
8/23/2012	4:21:04 PM	Bubbler valve opened
8/23/2012	4:21:04 PM	Helium MFC set to  0.000000
8/23/2012	4:21:04 PM	H2 MFC set to  500.000000
8/23/2012	4:21:04 PM	BCl3 MFC set to  0.000000
8/23/2012	4:21:04 PM	PH3 MFC set to  0.000000
8/23/2012	4:21:04 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:21:04 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:21:04 PM	Tube furnace set to 0
8/23/2012	4:21:05 PM	Helium valve closed
8/23/2012	4:21:05 PM	BCl3 valve closed
8/23/2012	4:21:05 PM	PH3 valve closed
8/23/2012	4:21:05 PM	SiCl4 pre valve closed
8/23/2012	4:21:05 PM	SiCl4 post valve closed
8/23/2012	4:21:05 PM	Main Vac valve closed
8/23/2012	4:21:05 PM	Bypass valve closed
8/23/2012	4:21:05 PM	H2 valve opened
8/23/2012	4:21:05 PM	Bubbler valve opened
8/23/2012	4:21:05 PM	Helium MFC set to  0.000000
8/23/2012	4:21:05 PM	H2 MFC set to  500.000000
8/23/2012	4:21:05 PM	BCl3 MFC set to  0.000000
8/23/2012	4:21:05 PM	PH3 MFC set to  0.000000
8/23/2012	4:21:05 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:21:05 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:21:05 PM	Tube furnace set to 1000
8/23/2012	4:41:05 PM	Helium valve closed
8/23/2012	4:41:05 PM	PH3 valve closed
8/23/2012	4:41:05 PM	Main Vac valve closed
8/23/2012	4:41:05 PM	Bypass valve closed
8/23/2012	4:41:05 PM	H2 valve opened
8/23/2012	4:41:05 PM	BCl3 valve opened
8/23/2012	4:41:05 PM	SiCl4 pre valve opened
8/23/2012	4:41:05 PM	SiCl4 post valve opened
8/23/2012	4:41:05 PM	Bubbler valve opened
8/23/2012	4:41:05 PM	Helium MFC set to  0.000000
8/23/2012	4:41:05 PM	H2 MFC set to  450.000000
8/23/2012	4:41:05 PM	BCl3 MFC set to  1.300000
8/23/2012	4:41:05 PM	PH3 MFC set to  0.000000
8/23/2012	4:41:05 PM	SiCl4 MFC set to  50.000000
8/23/2012	4:41:05 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:41:06 PM	Tube furnace set to 1000
8/23/2012	4:58:06 PM	Helium valve closed
8/23/2012	4:58:06 PM	BCl3 valve closed
8/23/2012	4:58:06 PM	PH3 valve closed
8/23/2012	4:58:06 PM	SiCl4 pre valve closed
8/23/2012	4:58:06 PM	SiCl4 post valve closed
8/23/2012	4:58:06 PM	Main Vac valve closed
8/23/2012	4:58:06 PM	Bypass valve closed
8/23/2012	4:58:06 PM	H2 valve opened
8/23/2012	4:58:06 PM	Bubbler valve opened
8/23/2012	4:58:06 PM	Helium MFC set to  0.000000
8/23/2012	4:58:06 PM	H2 MFC set to  500.000000
8/23/2012	4:58:06 PM	BCl3 MFC set to  0.000000
8/23/2012	4:58:06 PM	PH3 MFC set to  0.000000
8/23/2012	4:58:06 PM	SiCl4 MFC set to  0.000000
8/23/2012	4:58:06 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	4:58:06 PM	Tube furnace set to 750
8/23/2012	5:03:06 PM	H2 valve closed
8/23/2012	5:03:06 PM	BCl3 valve closed
8/23/2012	5:03:06 PM	PH3 valve closed
8/23/2012	5:03:06 PM	SiCl4 pre valve closed
8/23/2012	5:03:06 PM	SiCl4 post valve closed
8/23/2012	5:03:06 PM	Main Vac valve closed
8/23/2012	5:03:06 PM	Bypass valve closed
8/23/2012	5:03:06 PM	Helium valve opened
8/23/2012	5:03:06 PM	Bubbler valve opened
8/23/2012	5:03:06 PM	Helium MFC set to  500.000000
8/23/2012	5:03:06 PM	H2 MFC set to  0.000000
8/23/2012	5:03:06 PM	BCl3 MFC set to  0.000000
8/23/2012	5:03:06 PM	PH3 MFC set to  0.000000
8/23/2012	5:03:06 PM	SiCl4 MFC set to  0.000000
8/23/2012	5:03:06 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	5:03:06 PM	Tube furnace set to 0
8/23/2012	5:19:35 PM	Run aborted at 5:19 PM
8/23/2012	5:19:35 PM	Helium valve closed
8/23/2012	5:19:35 PM	H2 valve closed
8/23/2012	5:19:35 PM	BCl3 valve closed
8/23/2012	5:19:35 PM	PH3 valve closed
8/23/2012	5:19:35 PM	SiCl4 pre valve closed
8/23/2012	5:19:35 PM	SiCl4 post valve closed
8/23/2012	5:19:35 PM	Bypass valve closed
8/23/2012	5:19:35 PM	Main Vac valve closed
8/23/2012	5:19:35 PM	Bubbler valve closed
8/23/2012	5:19:35 PM	Helium MFC set to  0.000000
8/23/2012	5:19:35 PM	H2 MFC set to  0.000000
8/23/2012	5:19:35 PM	BCl3 MFC set to  0.000000
8/23/2012	5:19:35 PM	PH3 MFC set to  0.000000
8/23/2012	5:19:35 PM	SiCl4 MFC set to  0.000000
8/23/2012	5:19:35 PM	Tube furnace set to 0
8/23/2012	5:19:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/23/2012	5:19:38 PM	Recipe started at 5:19 PM
8/23/2012	5:19:38 PM	Helium valve closed
8/23/2012	5:19:38 PM	H2 valve closed
8/23/2012	5:19:38 PM	BCl3 valve closed
8/23/2012	5:19:38 PM	PH3 valve closed
8/23/2012	5:19:38 PM	SiCl4 pre valve closed
8/23/2012	5:19:38 PM	SiCl4 post valve closed
8/23/2012	5:19:38 PM	Main Vac valve closed
8/23/2012	5:19:38 PM	Bypass valve closed
8/23/2012	5:19:38 PM	Bubbler valve closed
8/23/2012	5:19:38 PM	Helium MFC set to  0.000000
8/23/2012	5:19:38 PM	H2 MFC set to  0.000000
8/23/2012	5:19:38 PM	BCl3 MFC set to  0.000000
8/23/2012	5:19:38 PM	PH3 MFC set to  0.000000
8/23/2012	5:19:38 PM	SiCl4 MFC set to  0.000000
8/23/2012	5:19:38 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	5:19:38 PM	Tube furnace set to 0
8/23/2012	5:19:41 PM	H2 valve closed
8/23/2012	5:19:41 PM	BCl3 valve closed
8/23/2012	5:19:41 PM	PH3 valve closed
8/23/2012	5:19:41 PM	SiCl4 pre valve closed
8/23/2012	5:19:41 PM	SiCl4 post valve closed
8/23/2012	5:19:41 PM	Main Vac valve closed
8/23/2012	5:19:41 PM	Bypass valve closed
8/23/2012	5:19:41 PM	Bubbler valve closed
8/23/2012	5:19:41 PM	Helium valve opened
8/23/2012	5:19:41 PM	Helium MFC set to  500.000000
8/23/2012	5:19:41 PM	H2 MFC set to  0.000000
8/23/2012	5:19:41 PM	BCl3 MFC set to  0.000000
8/23/2012	5:19:41 PM	PH3 MFC set to  0.000000
8/23/2012	5:19:41 PM	SiCl4 MFC set to  0.000000
8/23/2012	5:19:41 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	5:19:41 PM	Tube furnace set to 0
8/23/2012	5:19:41 PM	Helium valve closed
8/23/2012	5:19:41 PM	H2 valve closed
8/23/2012	5:19:41 PM	BCl3 valve closed
8/23/2012	5:19:41 PM	PH3 valve closed
8/23/2012	5:19:41 PM	SiCl4 pre valve closed
8/23/2012	5:19:41 PM	SiCl4 post valve closed
8/23/2012	5:19:41 PM	Main Vac valve closed
8/23/2012	5:19:41 PM	Bypass valve closed
8/23/2012	5:19:41 PM	Bubbler valve closed
8/23/2012	5:19:41 PM	Helium MFC set to  0.000000
8/23/2012	5:19:41 PM	H2 MFC set to  0.000000
8/23/2012	5:19:41 PM	BCl3 MFC set to  0.000000
8/23/2012	5:19:41 PM	PH3 MFC set to  0.000000
8/23/2012	5:19:41 PM	SiCl4 MFC set to  0.000000
8/23/2012	5:19:41 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	5:19:41 PM	Tube furnace set to 0
8/23/2012	5:19:42 PM	Run finished at 5:19 PM
8/23/2012	5:19:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/23/2012	5:23:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2012	5:23:16 PM	Recipe started at 5:23 PM
8/23/2012	5:23:16 PM	Helium valve closed
8/23/2012	5:23:16 PM	H2 valve closed
8/23/2012	5:23:16 PM	BCl3 valve closed
8/23/2012	5:23:16 PM	PH3 valve closed
8/23/2012	5:23:16 PM	SiCl4 pre valve closed
8/23/2012	5:23:16 PM	SiCl4 post valve closed
8/23/2012	5:23:16 PM	Main Vac valve closed
8/23/2012	5:23:16 PM	Bubbler valve closed
8/23/2012	5:23:16 PM	Bypass valve opened
8/23/2012	5:23:16 PM	Helium MFC set to  0.000000
8/23/2012	5:23:16 PM	H2 MFC set to  0.000000
8/23/2012	5:23:16 PM	BCl3 MFC set to  0.000000
8/23/2012	5:23:16 PM	PH3 MFC set to  0.000000
8/23/2012	5:23:16 PM	SiCl4 MFC set to  0.000000
8/23/2012	5:23:16 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	5:23:17 PM	Tube furnace set to 0
8/23/2012	5:24:36 PM	Helium valve closed
8/23/2012	5:24:36 PM	H2 valve closed
8/23/2012	5:24:36 PM	BCl3 valve closed
8/23/2012	5:24:36 PM	PH3 valve closed
8/23/2012	5:24:36 PM	SiCl4 pre valve closed
8/23/2012	5:24:36 PM	SiCl4 post valve closed
8/23/2012	5:24:36 PM	Main Vac valve closed
8/23/2012	5:24:36 PM	Bubbler valve closed
8/23/2012	5:24:36 PM	Bypass valve opened
8/23/2012	5:24:36 PM	Helium MFC set to  0.000000
8/23/2012	5:24:36 PM	H2 MFC set to  0.000000
8/23/2012	5:24:36 PM	BCl3 MFC set to  0.000000
8/23/2012	5:24:36 PM	PH3 MFC set to  0.000000
8/23/2012	5:24:36 PM	SiCl4 MFC set to  0.000000
8/23/2012	5:24:36 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	5:24:37 PM	Tube furnace set to 0
8/23/2012	5:25:37 PM	Helium valve closed
8/23/2012	5:25:37 PM	H2 valve closed
8/23/2012	5:25:37 PM	BCl3 valve closed
8/23/2012	5:25:37 PM	PH3 valve closed
8/23/2012	5:25:37 PM	SiCl4 pre valve closed
8/23/2012	5:25:37 PM	SiCl4 post valve closed
8/23/2012	5:25:37 PM	Bypass valve closed
8/23/2012	5:25:37 PM	Bubbler valve closed
8/23/2012	5:25:37 PM	Main Vac valve opened
8/23/2012	5:25:37 PM	Helium MFC set to  0.000000
8/23/2012	5:25:37 PM	H2 MFC set to  0.000000
8/23/2012	5:25:37 PM	BCl3 MFC set to  0.000000
8/23/2012	5:25:37 PM	PH3 MFC set to  0.000000
8/23/2012	5:25:37 PM	SiCl4 MFC set to  0.000000
8/23/2012	5:25:37 PM	Bypass solenoid MFC set to  0.000000
8/23/2012	5:25:37 PM	Tube furnace set to 0
8/23/2012	5:25:38 PM	Run finished at 5:25 PM
8/23/2012	5:25:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
